Asml Holding N.v.

Other

Daniel Leslie Hall

Victor Antonio Perez-Falcon

Marcus Adrianus Van De Kerkhof

Johannes Hubertus Josephina Moors

Samir A Nayfeh

Christopher John Mason

Arthur Winfried Eduardus Minnaert

Ronald Peter Albright

Andrew Judge

Jeffrey John Lombardo

Embodiments herein describe methods, devices, and systems for reducing an electric field at a clamp-reticle interface using an enhanced electrostatic clamp. In particular, the electrostatic clamp includes a clamp body, an electrode layer disposed on a top surface of the clamp body, and a plurality of burls that project from a bottom surface of the clamp body, wherein the electrode layer comprises a plurality of cutouts at predetermined locations that vertically correspond to locations of the plurality of burls at the bottom surface of the clamp body.

Lithographic apparatus and electrostatic clamp designs

Methods and systems are described for reducing particulate contaminants on a clamping face of a clamping structure in a lithographic system. A substrate such as a cleaning reticle is pressed against the clamping face. A temperature differential is established between the substrate and the clamping face either before or after clamping occurs to facilitate transfer of particles from the clamping face to the substrate.

Apparatus for and method of in-situ particle removal in a lithography apparatus

An implement for cleaning cooking grates. The cleaning implement has an elongated handle and a head including teeth. The teeth are adjustably secured to, and spaced laterally along, the head so as to fit in between the staves of a cooking grate. The teeth are laterally movable so as to be adjustable to a particular cooking grate. A preferred embodiment has a slot to provide for lateral movement of the teeth. One embodiment envisions use of tapered teeth for contacting the grate staves along a tapered region. One embodiment employs an ergonomic handle allowing for cleaning with only a horizontal back and forth motion.

Cooking grate cleaning implement

Growing community of inventors

San Diego, CA, United States of America

Daniel Leslie Hall