Oerlikon Surface Solutions Ag, Pfaffikon

Oerlikon Trading Ag, Trubbach

Oerlikon Surface Solutions Ag, Trubbach

Oerlikon Trading Ag, Truebbach

Daniel Lendi

Siegfried Krassnitzer

Jürgen Ramm

Beno Widrig

Markus Lechthaler

Denis Kurapov

Volker Derflinger

Juergen Ramm

Juerg Hagmann

Oliver Gstoehl

Andreas Reiter

Kurt Ruhm

Gerhard Tuymer

The present disclosure relates to a sputtering arrangement, a vacuum coating system, and a method for carrying out HiPIMS coating methods; the sputtering arrangement has at least two different interconnection possibilities and the switch to the second interconnection possibility, in which two sputtering sub-assemblies are operated simultaneously with high power pulses, achieves a productivity gain.

Sputtering arrangement and sputtering method for optimized distribution of the energy flow

A power distributor that is capable of distributing the high power from a DC generator to more than two targets sequentially and without the power output of the DC generator being interrupted. Furthermore, the invention relates to a sputter source that includes the power generator described above.

Power distributor for defined sequential power distribution

This invention relates to an arc-based method for the deposition of insulating layers and to an arc-based method for low-temperature coating processes, in which an electric arc discharge, ignited and applied on the surface of a target in an arc source, is simultaneously fed a direct current and a pulsed or alternating current. The invention further relates to an arc source in which the target is connected to a power supply unit that encompasses either a minimum of one pulsed high-current power supply' and an additional power supply&#x2033;, or a power supplydesigned with switchable combinatorial circuitry.

Method for operating a pulsed arc source

The present invention relates to a method for providing power pulses for PVD sputter cathodes which comprise a power consumption component and a cathode element, wherein during a power increase interval for a generator the power on the power consumption component is decreased and then the power on the cathode element is decreased, with changeover being effected such that the power draw from the generator providing the power does not have to be interrupted.

Method for providing sequential power pulses

The invention relates to a method for supplying power impulses for PVD sputtering cathodes subdivided into partial cathodes. In said method, the power impulse intervals acting on the partial cathodes are selected in such a way as to overlap, thereby dispensing with the need to interrupt the drawing of power supplied by the generator.

Method for supplying sequential power impulses

The present invention relates to a plasma source which is arranged in floating fashion on a vacuum chamber, wherein the plasma source comprises a source housing, and a filament is provided in the source housing and is arranged so as to be insulated therefrom, wherein means for measuring the potential drop between the source housing and the filament are provided. The measured potential drop can be used for regulating the voltage heating the filament. According to the invention, corresponding means are provided.

Plasma source

A vacuum process system for surface-treating work pieces uses an arc evaporation source. The system has a first electrode connected to a DC power source and a second electrode, disposed separately from the arc evaporation source. The two electrodes are operated while being connected to a single pulsed power supply.

Method for operating a pulsed arc evaporation source and vacuum process system comprising said pulsed arc evaporation source

The invention relates to a vacuum plasma generator for providing a plasma discharge () for treating work pieces () by way of a pulsed plasma process in a vacuum chamber (). Said vacuum plasma generator comprises a generator output (') having an AC mains supply (), an AC/DC mains rectifier system () for rectifying the AC mains voltage to a DC voltage, a filter capacitor (), a first stage as clocked DC/DC voltage converter () with means for adjusting the DC output voltage which produces an intermediate circuit voltage (Uz), comprising a controlled power switch () which feeds the primary winding of a transformer () and the secondary winding of which is connected to a rectifier () and a downstream intermediate capacitor () and configures a floating transformer secondary circuit (). Said secondary circuit is connected to a downstream second stage which is a pulse output stage () and is connected to the generator output (&#x2032;). The DC/DC voltage converter () has at least two floating transformer secondary circuits () and comprises a switch-over device () with a switch controller () for optionally switching the floating transformer secondary circuits () in parallel or in series.

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Daniel Lendi