Ameritherm, Inc.

Mks Instruments, Inc.

Eni Technology, Inc.

Daniel J Lincoln

Leslie L Thompson

Gary A Schwenck

Paul G Bennett

David J Coumou

Aaron T Radomski

Yogendra K Chawla

Gary C Adishian

John Cunliffe

Robert Sengillo, Jr

Bhima Rao Vijayendran

Jonathan W Smyka

Vadim Lubomirsky

Mariusz Oldziej

Dennis M Brown

Jonathan M Gorbold

Manfred Luttinger

William J Ryan

Steve Skewes

Lewis Hamilton

Jon Smyka

An eVC including coarse and fine tuning networks. The coarse tuning network includes a circuit: receiving a RF input signal from a RF generator; outputting a RF output signal to a reference terminal or load; and receiving a DC bias voltage. The circuit is switched between first and second states. A capacitance of the circuit is based on the DC bias voltage while in the first state and is not based on the DC bias voltage while in the second state. The fine tuning network is connected in parallel with the coarse tuning network and includes a varactor. The varactor includes: a first diode receiving the RF input signal; and a second diode connected in a back-to-back configuration with the first diode and outputting a RF output signal to the reference terminal or load. A capacitance of the varactor is based on a second received DC bias voltage.

Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network

A scalable radio frequency (RF) generator system including at least one power supply, at least one power amplifier receiving input from the power supply, and a power supply control module, and a system controller. Output from the at least one power supply can be combined and applied to each of the power amplifiers. Output form each of the at least one power amplifiers can be combined to generate a single RF signal. A compensator module controls operation of the at least one power supply. The compensator module, system control module, and power supply controller communicate in a daisy chain configuration.

High reliability RF generator architecture

A power supply including an inverter receiving a DC input signal from a DC input source (). The inverter is implemented as a single-ended inverter. Each inverter is driven by a signal source (A,B), which outputs an AC signal. The output from each inverter is input to a first stage harmonic filter. The power supply includes an output circuit that includes a rectifier (D) arranged about a point so that if the inverter attempts to drive the point beyond a predetermined voltage, the rectifier conducts in order to return at least one of power and current to the DC input source. The output from the first harmonic filter (LA, C; LB, C) is output to a second harmonic filter (L, C) and is then output from the power supply.

Class E amplifier with inductive clamp

A power supply including an inverter receiving a DC input signal from a DC input source (). The inverter is implemented as a single-ended inverter. Each inverter is driven by a signal source (A,B), which outputs an AC signal. The output from each inverter is input to a first stage harmonic filter. The power supply includes an output circuit that includes a rectifier (D) arranged about a point so that if the inverter attempts to drive the point beyond a predetermined voltage, the rectifier conducts in order to return at least one of power and current to the DC input source. The output from the first harmonic filter (LA, CLB, C) is output to a second harmonic filter (LC) and is then output from the power supply.

A power supply including an inverter receiving a DC input signal from a DC input source (). The inverter is comprised of two half bridges (SA, SA and SB, SB). Each inverter is driven by a signal source (A,B), which outputs an AC signal. The output from each inverter is input to a first stage harmonic filter. The power supply includes an output circuit that includes first and second rectifiers (D, D) arranged about a point so that if the inverter attempts to drive the point beyond a predetermined first and second voltage, the respective rectifier conducts in order to return at least one of power and current to the DC input source. The output from the first harmonic filter (LA, C; LB, C) is output to a second harmonic filter (L, C) and is then output from the power supply.

An RF power supply that is capable of tracking rapid changes in the resonant frequency of a load and capable of quickly responding to varying load conditions so as to deliver the desired amount of power. The present invention also provides an RF power supply capable of delivering a wide range of power over a broad frequency range to a load that is remotely located from the power supply. According to one embodiment, the RF power supply includes a direct current (DC) voltage source that provides a DC voltage within a predetermined voltage range; an amplifier, coupled to the DC voltage source, that provides an alternating voltage to a tank circuit connected to an output of the RF power supply; a frequency controller, coupled to the amplifier, to set the frequency of the alternating voltage produced by the amplifier; and a sensor, coupled to the load, to provide a signal to the frequency controller, where the frequency controller sets the frequency of the alternating voltage based on the signal received from the sensor.

Resonant frequency tracking system and method for use in a radio frequency (RF) power supply

RF power supply

A susceptor composition that can bond two or more layers or substrates to one another and that can be used to coat or cut a substrate. The susceptor composition is activated in the presence of radio frequency (RF) energy. In one embodiment, the susceptor composition of the present invention comprises a susceptor and a carrier. The carrier and susceptor are blended with one another and form a mixture, preferably a uniform mixture. The susceptor is present in an amount effective to allow the susceptor composition to be heated by RF energy. In a preferred embodiment, the susceptor also functions as an adhesive. The susceptor is an ionic or polar compound and acts as either a charge-carrying or an oscillating/vibrating component of the susceptor composition. The susceptor generates thermal energy in the presence of an RF electromagnetic or electrical field (hereafter RF field).

RF active compositions for use in adhesion, bonding and coating

A radio frequency (RF) power system for providing RF power to a load. The RF power system comprises a tank circuit; a direct current (DC) voltage source that provides a DC voltage within a first predetermined range; an amplifier, coupled to said DC voltage source, to provide an alternating voltage to said tank circuit; a frequency controller, coupled to said amplifier, to control a frequency of said alternating voltage provided by said amplifier; and a power sensor being coupled to said tank circuit for providing a signal to said frequency controller, wherein said frequency controller controls said frequency of said alternating voltage based on said signal provided from said power sensor.

An RF power supply that is capable of tracking rapid changes in the resonant frequency of a load and capable of quickly responding to varying load conditions so as to deliver the desired amount of power. The present invention also provides an RF power supply capable of delivering a wide range of power over a broad frequency range to a load that is remotely located from the power supply. According to one embodiment, the RF power supply includes a direct current (DC) voltage source that provides a DC voltage within a predetermined. voltage range; an amplifier, coupled to the DC voltage source, that provides an alternating voltage to a tank circuit connected to an output of the RF power supply; a frequency controller, coupled to the amplifier, to set the frequency of the alternating voltage produced by the amplifier, and a sensor, coupled to the load, to provide a signal to the frequency controller, where the frequency controller sets the frequency of the alternating voltage based on the signal received from the sensor.

System and method for providing RF power to a load

A power amplifier that provides wide-band, high efficiency, high voltage, HF power amplification over a large dynamic operating range. In one embodiment, the power amplifier includes a driver amplifier, an intermediate power amplifier comprising a coherently combined array of two transistors, and a final power amplifier comprising a coherently combined array of multiple transistors. The two stage driver amplifier drives the intermediate power amplifier, which drives the final power amplifier. Preferably, because of the inherent linearity, dynamic range, and power limiting requirements, the driver amplifier includes two transistor devices that are of the silicon power bipolar type, operating in class A with classic common-emitter circuit configuration. Preferably, the transistors used in the intermediate power amplifier and the final power amplifier are MOSFETS operating in a non-classic DC grounded-drain, RF common source circuit configuration.

High frequency power amplifier

A full-bridge amplifier that is able to provide power to all types of loads. The fill-bridge amplifier according to the present invention recovers reactive energy produced by capacitive loads instead of having the reactive energy be dissipated in the switches of the amplifier, thereby causing device failure. In one embodiment, two inductors and four diodes are added to the conventional full-bridge topology. Furthermore, a full-bridge amplifier according to an embodiment of the present invention is able to operate over a broad-band of radio frequencies.

Growing community of inventors

Brockport, NY, United States of America

Daniel J Lincoln