Hamamatsu-photonics K.k.

Energetiq Technology, Inc.

Daniel J Arcaro

Donald K Smith

Matthew Mark Besen

Stephen F Horne

Frederick Marvin Niell, Iii

Michael J Roderick

David B Reisman

A method and apparatus for generating light includes a chamber having a high voltage region, a low voltage region, and a plasma generation region that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma confinement region. A switched power supply includes a DC power supply and a switched resonant charging circuit that together generate a plurality of voltage pulses at the output causing a plurality of current pulses to be applied to the power delivery section around the magnetic core so that at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma. Light generated by the Z-pinch plasma propagates out of a port in the light source.

Inductively coupled plasma light source with switched power supply

Growing community of inventors

Medford, MA, United States of America

Daniel J Arcaro