Murata Manufacturing Co., Ltd.

Asml Netherlands B.v.

Leibniz-institut Fuer Festkoerper-und Werkstofforschung Dresden E.v.

Leibniz Institute for Solid State and Materials Research Dresden

Leibniz-institut Fuer Festkoerper-und Wrkstoffforschung Dresden E.v

Leibniz-Institut FÜr FestkÖrper-Und Werkstoffforschung Dresden E.v.

Daniel Grimm

Oliver G Schmidt

Shoichiro Suzuki

Martin Bauer

Akira Ando

Koichi Banno

Johan Franciscus Maria Beckers

Nirupam Banerjee

Arend Johannes Donkerbroek

Daniil Karnaushenko

Denys Makarov

Dmitriy Karnaushenko

Sandro Wricke

Tim Rathje

Peter Brakhage

Martin Tilke

An image sensor for immersion lithography, the image sensor including: a grating; an absorber layer on the grating, the absorber layer configured to absorb radiation; and a liquidphobic coating at an upper surface of the image sensor, wherein a protective layer is provided between the absorber layer and the liquidphobic layer, the protective layer being less reactive than the absorber layer to an immersion liquid.

Image sensor for immersion lithography

A roll-up type capacitor includes a cylindrical part, a first external electrode, and a second external electrode. The cylindrical part is a rolled-up laminate in which a lower electrode layer, a dielectric layer and an upper electrode layer are laminated in this order. The first external electrode is electrically connected to the upper electrode layer, and the second external electrode is electrically connected to the lower electrode layer, and the first external electrode and the second external electrode are respectively located on opposed sides of the cylindrical part such that they face to each other.

Capacitor and process for producing thereof

The present invention relates to the fields of physics, material sciences and micro and nano electronics, and concerns a method for producing a rolled-up electrical or electronic component, as can be used for example as a capacitor, or in aerials. The object of the present invention is to provide a low-cost, environmentally friendly and time-saving method for producing a rolled-up electrical or electronic component with many windings. The object is achieved by a method for producing a rolled-up component in which at least two functional and insulating layers, alternately arranged fully or partially over one another, are applied to a substrate with a sacrificial layer, wherein at least the functional or insulating layer that is arranged directly on the sacrificial layer has a perforation, at least on the two sides that are arranged substantially parallel to the rolling direction.

Method for producing a rolled-up electrical or electronic component

The present invention relates to the area of micro- and nanoelectronics and relates to ultra-compact micro capacitors, how they can be used, for example, in electrical and electronic devices. The object of the present invention consists in specifying an ultra-compact micro capacitor with the highest capacity. The problem is solved by an ultra-compact micro capacitor which is made from a rolled-up layer stack of alternatingly arranged layers of dielectric and/or electrically insulating and electrically conductive materials with rolled-up lengths of the layer stack of at least 1 mm, and an absolute electrical storage capacity of at least 10 nF. The problem is additionally solved by a method, in which a layer containing a water-soluble cellulose derivative is applied to a substrate and a layer stack to same, the layer containing the cellulose derivative is removed from the substrate using water, an organic solvent and/or an organic solvent mixture, and the layer stack is rolled up with a rolling speed of more than 0.1 mm/min.

Ultra compact micro capacitor and method for producing same

Growing community of inventors

Dresden, Germany

Daniel Grimm