R2 Semiconductor, Inc.

Asml Us, Inc.

Daniel Dobkin

Pablo Moreno Galbis

Cory Severson

Lawrence M Burns

James E C Brown

David A Fisher

Adam Q Miller

James Ec Brown

Embodiments for methods, apparatus and systems for operating a voltage regulator are disclosed. One embodiment of the voltage regulator generates a switching voltage through controlled closing and opening of a series switch element and a shunt switch element. The voltage regulator further includes a switched output filter that includes a plurality of capacitors for filtering the switching voltage and generating an output voltage. A mode controller is operative to disconnect at least one of the plurality of capacitors upon receiving a first indicator, where disconnecting causes the at least one of the plurality of capacitors to electrically float, wherein while the at least one capacitor is disconnected the output voltage is changed from a first value to a second value, return the output voltage to a first value or a third value upon receiving a second indicator, and reconnect the at least one of the plurality of capacitors.

DC-DC converter enabling rapid output voltage changes

Embodiments for at methods, apparatus and systems for operating a voltage regulator are disclosed. One apparatus includes a switching voltage regulator, wherein the switching voltage regulator includes a series switch element, a shunt switch element, a switching controller and a switched output filter. The switching controller is configured to generate a switching voltage through controlled closing and opening of the series switch element and the shunt switch element. The switched output filter filters the switching voltage and generates a regulated output voltage, wherein the switched output filter includes a plurality of capacitors that are selectively included within the switched output filter.

Multimode operation DC-DC converter

Embodiments for at methods, apparatus and systems for operating a voltage regulator are disclosed. One method includes generating, by a switching controller, a switching voltage through controlled closing and opening of a series switch element and a shunt switch element. Further, the method includes generating, by a switchable output filter, a regulated output voltage by filtering the switching voltage, wherein the switchable output filter comprises a plurality of capacitors that are selectively included within the switchable output filter.

A chemical vapor deposition (CVD) apparatus is provided. The CVD apparatus comprises a deposition chamber and a main chamber. The deposition chamber comprises at least one single injector and one or more exhaust channels. The main chamber supports the deposition chamber and includes at least one gas inlet to inject at least one gas into the main chamber. The gases are removed through the exhaust channels, thereby creating an inwardly flowing purge which acts to isolate the deposition chamber. At least one semi-seal is formed between the deposition chamber and the substrate which acts to confine reactive chemicals within each deposition region.

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Sunnyvale, CA, United States of America

Daniel Dobkin