Kla Tencor Corporation

Daniel Bui

Oscar G Florendo

Christopher Sears

Xinrong Jiang

Luca Grella

Nikolai N Chubun

Sameet K Shriyan

Laurence S Hordon

Joseph Maurino

Kevin Cummings

These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant power in the beam separator coils. Wien power can be determined, and then heater coil current can be determined.

Method of eliminating thermally induced beam drift in an electron beam separator

Extractors and extractor systems minimize the generation of secondary electrons which interact with and degrade the primary electron beam. This can improve the performance of an electron beam system, such as a scanning electron microscope. The extractor may include a frustoconical aperture that widens as distance from the source of the electron beam increases. The entrance into the frustoconical aperture also can include a curved edge.

Extractor electrode for electron source

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Castro Valley, CA, United States of America

Daniel Bui