Minnesota Mining and Manufacturing Company

3m Innovative Properties Company

Daniel B Pendergrass, Jr

Robert J Streifel

Michael J Muilenburg

John J Gagliardi

Wesley J Bruxvoort

Richard J Webb

Jerry J Fizel

Chong-Yong J Kim

Bradley L Duell

Billy Lee Weaver

Brian D Goers

Smarajit Mitra

Gary M Palmgren

Jerry Lee Alexander

Robert Charles Fitzer

Silva K Theiss

Robert G Smith

Richard J Kuo

Alexander Chieruen Tsuei

Jack W Charbonneau

Douglas P Goetz

Charles E Boyer, Iii

Mike E Hamerly

Vincent J Laraia

Andrew H Behr

Gary B Forsberg

Ellen Burts-Cooper

Charles R Kummeth

Alexander C-r Tsuei

Lorenz Kogl, Iii

W Nigel Powell

R James Norbury

The disclosure relates to abrasive articles useful in chemical-mechanical polishing (CMP), the articles including a substrate with opposite major surfaces, an abrasive material overlaying at least a portion of at least one of the major surfaces, and at least one of a radio frequency identification (RFID) tag, a RFID tag reader, or a sensor for providing CMP information to a transmitter positioned near the substrate, the transmitter positioned near the substrate and adapted to wirelessly receive CMP information and wirelessly transmit the CMP information to a remote receiver. The disclosure also relates to a CMP pad conditioner for wirelessly communicating CMP information to a remote receiver, a CMP process monitoring system for wirelessly communicating CMP information to a remote receiver, and a method for conditioning a CMP pad using a CMP process monitoring system for wireless communicating CMP information to a remote receiver.

Abrasive articles, CMP monitoring system and method

Internally replenished gas-containing enclosures are described. Such enclosures include a replenishing gas source internal to the enclosure, wherein the gas source comprises a gas contained within a permeable membrane. Exemplary gas sources include a plurality of bubbles and pouches. Materials useful for the permeable membrane include glass, glass ceramics, metals, metal oxides, polymeric films, as well as combinations of such materials. The gas source may be located within the enclosure or it may be incorporated into a resin (e.g., an adhesive or a gasket) positioned between sections of an enclosure. Methods of internally replenishing an enclosure are also described.

Internally replenished enclosure

A process for planarizing, polishing, or providing other modification of a wafer surface or other workpiece. The process includes using an abrasive article having a textured abrasive coating affixed to a backing. The abrasive article includes a monitoring element, such as a window, to allow transmission of radiation therethrough. The radiation level is monitored throughout the planarization process to determine the approach of the desired endpoint. The window in the abrasive coating can be an area devoid of abrasive coating or having minimal or a thinned abrasive coating.

Abrasive article having a window system for polishing wafers, and methods

A micrometer sized multi-directional thermal actuator capable of repeatable and rapid displacement in a substantially horizontal direction, a substantially vertical direction, and/or a combination thereof. The multi-directional thermal actuator constructed on a surface of a substrate includes three or more beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate. A member mechanically and electrically couples the distal ends of the beams. Application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.

Multi-directional thermal actuator

An apparatus and method for abrasively processing an article involves the use of an abrasive product provided with a machine discernable pattern representative of information of varying types. The pattern is read while the abrasive product moves relative to the article, and is used to control the movement of the abrasive product relative to the article. The pattern may include one or more of a machine discernable electrical characteristic, optical characteristic, topographic characteristic or magnetic characteristic. Reading the pattern may involve one or more of electrically, optically, mechanically or magnetically reading the machine discernable pattern provided on the abrasive product. The pattern may include one or more of indicia, protrusions, depressions, holes, voids, color or pigment variations, bar codes, magnetic transitions or periodic markings. The pattern may include one or more of indexing information, servo information, alignment information or abrasive product identification information. Closed-loop servo control of abrasive product movement may be effected using the servo/indexing pattern information. The abrasive product may constitute a movable pad and an abrasive slurry. The pad may be moved in a controlled manner relative to the article such that the pad and the abrasive slurry abrasively contact the article. The pattern provided on the pad may be read subsequent to a cleaning operation. An information system may be used to store various types of data derived, in part, from use of the abrasive product pattern information. The stored data may be used for a variety of identification, tracking, accounting, inventory, handling, and statistical purposes.

Abrasive processing apparatus and method employing encoded abrasive product

A method of modifying a surface comprising the steps of: (a) contacting the surface to be modified with a working surface of an abrasive article, the abrasive article comprising a phase separated polymer having a first phase and a second phase, the first phase being harder than the second phase; and (b) relatively moving the surface to be modified and the fixed abrasive article to remove material from the surface to be modified in the absence of an abrasive slurry.

Method of modifying a surface

A candle is provided for delivery of an active ingredient comprising a multiphase construction of a continuous first matrix and a second matrix dispersed therein. The first matrix comprises a thermoplastic material, and the second matrix comprises a thermoplastic material which additionally comprises an active ingredient. The second matrix is a discrete phase of small bodies having size in longest dimension between about 0.05 microns to about 5 mm. The material of the second matrix is selected such that the Rate of Release of the second matrix containing the active ingredient is substantially the same as the Rate of Release of the first matrix and the Tested Physical Property of the multiphase construction is at least about 10% higher than the Tested Physical Property of a homogeneous combination of equivalent amounts of the first matrix material, the second matrix material and the active agent in at least one the tests selected from the group consisting of the Shear Strength Test, Active Migration Test, the Tensile Modulus Test or the Flexural Modulus Test.

Multiphase candle containing locally enriched regions of deliverable

Water-based pigmented ink formulations are disclosed including a water soluble or water dispersible silicone-containing polymer additive comprising a vinyl silicone polymer. The additive significantly reduces kogation, mudcracking, and banding in some or all of the pigmented ink formulations.

Water-based pigmented inks having silicone-containing polymer

Microcapsules are prepared by dispersing or dissolving an active component or components in a solid matrix-forming material that has been thermally softened to form an encapsulation composition. The encapsulation composition is injected as an intact stream into a quenching liquid to provide solid microcapsules.

Method of encapsulation and microcapsules produced thereby

An apparatus for delivering one or more aromas at selected times includes a housing with a receptacle and an aroma delivery device detachably received in the receptacle. The aroma delivery device includes a carrier having a plurality of aroma-bearing elements that are selectively communicated with an air passageway for providing one or more aromas as desired. The device is especially useful for providing a realistic sensory experience in an interactive or non-interactive use, and may be used in such diverse settings as the entertainment industry, the educational training field or a medical arena.

Device for selectively providing a multiplicity of aromas

Writing instruments are provided comprising a) a friction transferable binder comprising a colorant, and b) frangible microcapsules containing a liquid solvent. The writing instrument contains sufficient microcapsules to provide a Coloration Uniformity Percentage (defined herein) of at least about 25%.

Blendable writing instrument

Microcapsules containing a shell wall and a liquid fill are produced by an interfacial polymerization reaction between a polyfunctional aziridine and at least one other polyfunctional organic coreactant selected from the group of polyacid halides, polycarboxylic acids, polyamines, polyhydroxyl-containing compounds, polythiol-containing compounds, polyisocyanates, polyisothiocyanates, and mixtures thereof.

Microcapsules from polyfunctional aziridines

A device for delivery of volatile materials comprising a volatile material delivery layer, a support layer and a repositionable adhesive layer. Devices so constructed may be applied to any desired substrate without fear of harming the surface of the substrate.

Repositionable device for delivery of volatile materials

A fragrance-delivery composition is provided having cake-forming components and microcapsules containing fragrance oil. The composition is a coherent cake, and has a VOC content less than 250 grams of per liter less water, fragrance oil and exempt solvents.

Growing community of inventors

Mendota Heights, MN, United States of America

Daniel B Pendergrass, Jr