Cymer, Inc.

D-squared Product Development

Daniel Anthony Rothweil

William N Partlo

Richard M Ness

Richard L Sandstrom

Daniel L Birx

Herve A Besaucele

Paul C Melcher

Brett D Smith

Igor Vladimirovich Fomenkov

Palash P Das

Richard G Morton

Peter Clarke Newman

Thomas Patrick Duffey

David Anthony Rothweil

Alexander Igorevich Ershov

Richard C Ujazdowski

Tom A Watson

Thomas Hofmann

John T Melchior

Toshihiko Ishihara

Robert G Ozarski

Tibor Juhasz

R Kyle Webb

David Wayne Myers

David S Knowles

Paul S Thompson

Gamaralalage G Padmabandu

Jean-Marc Hueber

Paolo Zambon

James H Azzola

A device for cleaning surfaces is disclosed, comprising; a housing having a handle on one end and a cleaning head on the other end the cleaning head having an upper surface, a lower surface, a perimeter edge and a magnetic means. The magnetic means is removably attached to the cleaning head and provides a magnetic field to its lower surface. There is at least one attachment means provided on the upper surface or the perimeter for securing a cleaning sheet over the lower surface of the cleaning head.

Cleaning implements having magnetic means

A collapsible enclosure for protecting food from pests and debris comprises in one configuration at least two flexible structural beams, a cover having a top portion and a bottom portion, at least one opening and at least one flap attached above the opening. The flap is substantially larger in length and width than the opening and has ballast along its base to hold it flush against the at least one opening. In another configuration the collapsible protective food enclosure comprises three or more resilient structural frame loops, a cover having at least one opening and a flap. The structural frame loops are affixed within the cover forming walls. The flap is attached above the opening and has a resilient structural frame loop affixed along its perimeter to allow the flap to fit flush against the at least one opening.

Collapsible food protective enclosure

The present invention is a device for cleaning surfaces comprising; a housing having a handle on one end and a cleaning head on the other end the cleaning head having an upper surface, a lower surface, a perimeter edge and a magnetic means. The magnetic means is removably attached to the cleaning head and provides a magnetic field to its lower surface. There is at least one attachment means provided on the upper surface or the perimeter for securing a cleaning sheet over the lower surface of the cleaning head.

The present invention is a collapsible enclosure comprising, a plurality of structural support beams, a hub having a plurality of attachment means and a pressure plate positioned below the attachment means to which one end of the structural support beams are attached and a cover disposed upon and traversing between the structural support beams. The top portion of the cover having means for receiving the plurality of structural support beams and the bottom portion having adapters for receiving the other ends of the plurality of structural support beams. The cover may have one or more openings and one or more flaps to secure the one or more openings.

Portable enclosure

Reliable, modular, production quality narrow-band high rep rate ArF excimer laser

A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 4000 charges per second. In a preferred embodiment capable of operating at pulse rates of 2000 to 4000 Hz or greater, water cooling of the saturable inductors is provided.

High pulse rate pulse power system with liquid cooling

A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.

High pulse rate pulse power system with fast rise time and low current

The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses at 2000 Hz with a full width half, maximum bandwidth of about 0.6 pm or less. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Improvements in the laser chamber permitting the higher pulse rates and improved bandwidth performance include a single upstream preionizer tube and a high efficiency chamber. The chamber is designed for operation at lower fluorine concentration. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.

Reliable modular production quality narrow-band high REP rate excimer

A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated resonant power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.

High pulse rate pulse power system with resonant power supply

The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.

Reliable, modular, production quality narrow-band high rep rate F.sub.2

A reliable, modular, production quality narrow-band KrF excimer laser capable of producing 10 mJ laser pulses at 1000 Hz with a bandwidth of about 0.6 pm or less. The present invention is especially suited to long-term round-the-clock operation in the lithographic production of integrated circuits. Improvements over prior art lasers include a single upstream preionizer tube and acoustic baffles. A preferred embodiment includes reduced fluorine concentration, an anode support bar shaped to reduce aerodynamic reaction forces on blower bearings, a modified pulse power system providing faster pulse rise time, an output coupler with substantially increased reflectivity, a line narrowing module with CaF prism beam expanders, a more accurate wavemeter, a laser computer controller programmed with new and improved pulse energy control algorithm.

Reliable. modular, production quality narrow-band KRF excimer laser

An excimer laser system having a laser chamber containing elongated electrodes and an excimer laser gas and a high voltage pulse power supply having fine digital regulation for supplying high voltage electrical pulses to the electrodes. The high voltage pulse power supply includes a power supply and a magnetic switch circuit for compressing and amplifying the output of the power supply. The power supply includes a silicon controlled rectifier which provides a direct current output to an inverter which converts the output of the silicon controlled rectifier to high frequency alternating current which is in turn amplified by a step up transformer. An output stage diode rectifier in combination with an inductor converts this high frequency high voltage current back to direct current. A control board comprising electronic circuits controls the power supply to provide high voltage pulses at a frequency of at least 1000 Hz. A voltage feedback circuit detects the voltage output of the output stage rectifier and provides a voltage output signal to the control board and a current feedback circuit detects charging current flowing in the output stage diode rectifier and provides a charging current signal to the control board. A digital command control for providing command control to said control board. A preferred embodiment of the present invention achieves very precise regulation with the use of differential instrumentation amplifiers in the feedback circuits and by reducing the charging current near the end of the charging cycle of each pulse.

Excimer laser having power supply with fine digital regulation

High pulse rate pulse power system

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Poway, CA, United States of America

Daniel Anthony Rothweil