Asml Netherlands B.v.

Daniel Andrew Smith

Paul Janssen

James Norman Wiley

Derk Servatius Gertruda Brouns

Matthias Kruizinga

Dennis De Graaf

Beatrijs Louise Marie-Joseph Katrien Verbrugge

Robertus Cornelis Martinus De Kruif

Arnoud Willem Notenboom

Amoud Willem Notenboom

Derk Servatius Brouns

Beatrijs Louise Verbrugge

Robertus Cornelis De Kruif

A method comprising the steps of receiving a mask assembly comprising a mask and a removable EUV transparent pellicle held by a pellicle frame, removing the pellicle frame and EUV transparent pellicle from the mask, using an inspection tool to inspect the mask pattern on the mask, and subsequently attaching to the mask an EUV transparent pellicle held by a pellicle frame. The method may also comprise the following steps: after removing the pellicle frame and EUV transparent pellicle from the mask, attaching to the mask an alternative pellicle frame holding an alternative pellicle formed from a material which is substantially transparent to an inspection beam of the inspection tool; and after using an inspection tool to inspect the mask pattern on the mask, removing the alternative pellicle held by the alternative pellicle frame from the mask in order to attach to the mask the EUV transparent pellicle held by the pellicle frame.

Mask assembly and associated methods

Growing community of inventors

Eindhoven, Netherlands

Daniel Andrew Smith