Brooks Automation Gmbh

Other

Varian Semiconductor Equipment Associates, Inc.

Daniel A Hall

Glenn L Sindledecker

Christopher A Hofmeister

William John Fosnight

Jeff G Araujo

Matthew W Coady

Steven J Allen

Marcello Trolio

Michael Spinazola

Ulysses Gilchrist

Robert T Caveney

Roger Bradford Fish

Steven M Anella

Scott C Holden

Scott E Peitzsch

Michael Esposito

Richard V Chisholm

Robert A Poitras

Michael E Hall

A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.

Load port module

A corn cob harvesting machine includes a tractor, cob harvester, and trailer that together lift, clean, and separate corn cobs from a corn harvester combine chaff windrow. The cob harvester has a floating cob lift immediately adjacent to and through various skirts engaging the earth that is supported by and floats with respect to a support frame. The floating cob lift has a rotary paddle that lifts and throws cobs into the first cross draft separator. The first cross draft separator has a blower that generates a vacuum within the floating cob lift. An adjustable flap intermediate between rotary paddle and blower deflects cobs and other heavier matter out of the air stream, while lighter matter is removed. A first cross draft separator removes chaff, a rock trap separates rocks, and a second cross draft separator removes additional chaff. A discharge conveyor transfers cleaned corn cobs to the trailer.

Corn cob harvesting machine

A system and method for monitoring forces on a substrate lifting apparatus. The system includes a platen cartridge with a platen and a movable lifting portion. The movable lifting portion includes a plurality of lifting arms coupled to a plurality of lift pins. A plurality of force sensing elements are associated with respective ones of the plurality of lifting arms and the plurality of lift pins. A controller receives signals from the plurality of force sensing elements, correlates the signals to respective forces applied to said plurality of lift pins. The correlated forces may indicate to the controller that an error condition exists, such as a stuck wafer, a broken wafer, a mis-positioned wafer, or a mechanical malfunction.

Force sensing system for substrate lifting apparatus

A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.

Equipment storage for substrate processing apparatus

A substrate processing apparatus having a frame, a housing, an access system and at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame. The access system is connected to the frame and forms an access through which substrates are moved in and out of the housing. The substrate transport apparatus or substrate processing device are connected to the frame and are at least partially positioned in the housing. The frame comprises a movable portion. The movable portion is movable relative to the frame so that movement of the movable portion causes separation of the access system and at least one of the substrate transport apparatus or substrate processing device from an installed position. The substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus. Each of the different interchangeable substrate transport apparatus has a predetermined reference datum and positioning features for positioning the substrate transport apparatus relative to the frame. The positioning features of each substrate transport apparatus are controllably located relative to its predetermined reference datum to be in a repeatable predetermined location with substantially no variance between the different interchangeable substrate transport apparatus.

Substrate processing apparatus with removable component module

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West Newbury, MA, United States of America

Daniel A Hall