International Business Machines Corporation

Dana Roberts Townsend

Louis H Faure

Thomas J Walsh

Howard Thomas Johnston, Jr

A test probe employing a buckling beam array for testing integrated circuits. A pair of identical sets of guides are positioned on either side of a centerpost to align the buckling beams. In one embodiment the holes in one set of guides is offset by a key to induce prebow in the beams. In another embodiment prebow is induced by a floating asymmetric separator positioned on the centerpost between the guide sets. When a force is applied to the probe, the beams deflect in the direction but to different extents so that a uniform force is applied to the surface of the IC irrespective of variations in height.

Modular test probe

A multiple site probe for simultaneous probing of multiple chip site clusters of pads. The multiple site probe assembly includes a mounting plate having a plurality of groups of adjustably mounted probes thereon. A plurality of cams cooperate with cam followers associated with individual groups of probes, each of the cam and cam followers having a displacement which is dependent upon its distance from a predetermined and fixed reference relative to the mounting plate. An actuator is connected to the cams so as to effect simultaneous actuation of the cams and to allow for differential displacement of each group of the groups of probes so as to compensate for accumulated tolerances and/or shrinkage of the substrate.

Growing community of inventors

Fishkill, NY, United States of America

Dana Roberts Townsend