Strasbaugh

Dan Trojan

Thomas A Walsh

Technique including a method 400 and an apparatus 100 for chemical mechanical polishing using a plurality of carrier devices 123 rotatably coupled to a turret means. The apparatus 100 includes a turret and plurality of rotatable polishing surfaces 111 positioned around the turret. The apparatus also includes a plurality of carrier devices 123 rotatably coupled to the turret, where the carrier devices 123 are each adapted to hold a workpiece to be polished on at least one of the rotatable polishing surfaces. Each of the carrier devices is operably independently to each other during a process for chemical mechanical polishing.

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Phoenix, AZ, United States of America

Dan Trojan