Kla Tencor Corporation

Dan Scott

Sunil Kumar

Hendrik John

Othon Monteiro

Anthony A Digiovanni

Ilya Bezel

Matthew Derstine

Anant Chimmalgi

Lauren Wilson

Rudolf C Brunner

Rajeev Patil

Younus Vora

Jincheng Wang

Erik Kim

Ken Gross

Quang Giang

Cedric Lasfargues

Anthony Digiovanni

A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures

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San Jose, CA, United States of America

Dan Scott