Parker-hannifin Corporation

Dan Funke

Kenneth W Cornett

Paul A Dudzinski

Jeremy Payne

Douglas Schenk

Stephen J Coppola

Julian Kamibayashiyama

Don Bowman

Jeff Navarro

Ken Cornett

Donald J Peterson

A flow control mechanism includes a housing defining a through bore and a cavity contiguous with the through bore, and a barrier received within the cavity of the housing. The barrier is moveable between a sealing position in which fluid flow through the housing is permitted in one direction through the housing and blocked in an opposite direction, and a non-sealing position in which the flow control mechanism is configured to receive an attachment member. An actuating mechanism returns the barrier to the sealing position when the attachment member separates. The actuating mechanism may be an elastomeric band that is in a non-stretched state when the barrier is in the sealing position and in a stretched state when the barrier is in the non-sealing position. The barrier returns from the non-sealing position to the sealing position by action of torque of the stretched flexible member as the flexible member returns to the non-stretched state.

Captured ball valve mechanism

A seal for sealing an interface between a container and a lid of a process chamber. The seal comprises a first seal element and a second seal element that are arranged to seal the interface in series, with the second seal element being situated to encounter processing activity upstream of the fist seal element. The first seal element has a deflectable portion and a protrusion extending radially from the deflectable portion. The second seal element has a radially extending recess in which the protrusion of the first seal element is received. The protrusion and recess interlock to restrict separation and/or rotation of the first and second seal elements. Inclined surfaces of the first seal element interact with the second seal element to apply axial sealing forces to sealing surfaces of the second seal member.

Substrate processing apparatus with composite seal

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San Diego, CA, United States of America

Dan Funke