Nova Measuring Instruments Ltd.

Scitex Inc.

Dan Eylon

Daniel Seidner

The present invention provides a method for determining a location on an object without prealignment and for positioning an object, such as a semiconductor, which has an array of generally perpendicular grid lines on its surface and a plurality of directional features. According to one embodiment the method determines the directions for the grid lines relative to the direction of a reference coordinate system, detects a grid junction and detects a direction of a reference coordinate system, detects a grid junction and detects a direction of one of the plurality of directional features, thereby providing a location of the grid junction in the reference coordinate system. According to an alternative embodiment, the method includes the steps of determining the directions of the grid lines relative to the direction of a reference coordinate system, detecting an asymmetrical directional feature, its orientation with respect to the directions of the grid lines and the distance of the asymmetrical feature from a geometrical center of the surface being known; and detecting a direction of the asymmetrical directional feature, thereby providing a location of the asymmetrical feature in the reference coordinate system. The object is positioned in accordance with the provided location of the grid junction.

Method and apparatus for determining a location on a surface of an object

A method is proposed for determining a location on an object and for positioning an object, such as a silicon wafer, which has an array of generally perpendicular grid lines on its surface and a plurality of directional features. The method determines the directions of the grid lines relative to the direction of a reference coordinate system, detects a grid junction and detects a direction of one of the plurality of directional features, thereby providing a location of the grid junction in the reference coordinate system. The object is positioned in accordance with the provided location of the grid junction.

Apparatus and method for descreening and for performing resolution changes and correction of misregistration on a color half-tone image in order to produce a color continuous tone image. The apparatus includes filter apparatus for removing screen information from the half-tone image including a plurality of different filters each providing interpolation and screen removal functions and a controller for selecting per pixel of the continuous tone image and in accordance with sensed misregistration and as a function of desired resolution changes, one of the filters for operation on a neighborhood of the pixel.

Apparatus and method for descreening

Apparatus and method for descreening and for performing resolution changes on a half-tone image in order to produce a continuous tone image. The apparatus includes filter apparatus for removing screen information from the half-tone image including a plurality of different filters each providing interpolation and screen removal functions and a controller for selecting per pixel of the continuous tone image and as a function of desired resolution changes, one of the filters for operation on a neighborhood of the pixel.

Growing community of inventors

Tel Aviv, Israel

Dan Eylon