New Wave Research

Dan Dere

Duane Lee Middlebusher

Antonio D Lucero

Kuo-Ching Liu

Steven Oltrogge

Jenn Liu

Pei Hsien Fang

Jih-Chuang Huang

Scott Pinkham

A process and system scribe sapphire substrates, by performing the steps of mounting a sapphire substrate, carrying an array of integrated device die, on a stage such as a movable X-Y stage including a vacuum chuck; and directing UV pulses of laser energy directed at a surface of the sapphire substrate using a solid-state laser. The pulses of laser energy have a wavelength below about 560 nanometers, and preferably between about 150 in 560 nanometers. In addition, energy density, spot size, and pulse duration are established at levels sufficient to induce ablation of sapphire. Control of the system, such as by moving the stage with a stationary beam path for the pulses, causes the pulses to contact the sapphire substrate in a scribe pattern at a rate of motion causing overlap of successive pulses sufficient to cut scribe lines in the sapphire substrate.

Scribing sapphire substrates with a solid state UV laser

Growing community of inventors

Palo Alto, CA, United States of America

Dan Dere