Tianma Micro-electronics Co., Ltd.

Shanghai Tianma Am-oled Co., Ltd.

Shanghai Micro Electronics Equipment (group) Co., Ltd.

Dan Chen

Dong Qian

Gang Liu

Chen Liu

Hanyu Gu

Zhiyong Yang

Xianying Wang

A method for vertical control of a lithography machine includes step 1, prior to a scanning exposure, controlling vertical measurement sensors to measure workpiece to obtain overall surface profile data of the workpiece; step 2, performing a global leveling based on the overall surface profile data of the workpiece; and step 3, during the scanning exposure of each exposure field, measuring a local surface profile of the workpiece in real time by the vertical measurement sensors and controlling at least one of a mask stage, a workpiece stage and a projection objective to move vertically according to a Z-directional height value, an Rx-directional tilt value and an Ry-directional tilt value corresponding to the local surface profile of the workpiece, to compensate for the local surface profile of the workpiece in real time, so that an upper surface of each exposure field coincides with a reference focal plane for the exposure field. This method enables flexible vertical control with high accuracy by providing multiple control options.

Vertical control method for use in lithography machine

The application provides a pixel circuit, a driving method, a display panel and a display device. The pixel circuit includes a first transistor, a second transistor, a third transistor, a fourth transistor, a fifth transistor, a sixth transistor, a driving transistor, a storage capacitor and a light emitting element, and by cooperative driving of the respective transistors and the storage capacitor, the driving current of the driving transistor can be independent of the gate-source voltage and the threshold voltage of the driving transistor.

Pixel circuit, driving method, display panel and display device

An Organic Light Emitting Diode pixel compensation circuit is disclosed. The circuit includes first through fifth transistors, and a storage capacitor. The first transistor is coupled to a first scan signal, a power supply voltage, and a first electrode of the storage capacitor. In addition, the second transistor is coupled to the first scan signal, a data signal, and the third transistor. The third transistor is coupled to the power supply voltage, and the fifth transistor. Furthermore, the fourth transistor is coupled to a second scan signal, the third transistor, and the storage capacitor, and fifth transistor is coupled to a light emitting signal, and the OLED. In addition, the storage capacitor is coupled to the fifth transistor, and a low-level signal and emits light based on a drive current generated by the third transistor.

Organic light emitting diode pixel compensation circuit, and display panel and display device containing the same

An OLED pixel compensation circuit includes first, second, third, fourth, fifth, sixth and seventh transistors and a storage capacitor. The first transistor has a gate electrode coupled to a scan signal, a first electrode coupled to a data signal, and a second electrode coupled to a gate electrode of the fifth transistor. The second transistor has a gate electrode coupled to the scan signal, a first electrode coupled to a power supply voltage, and a second electrode coupled to a second electrode of the storage capacitor. The third transistor has a gate electrode coupled to a first light emitting signal, a first electrode coupled to the power supply voltage. The transistors and the storage capacitor are configured to compensate the threshold voltage drift of the fifth transistor, which is the driving transistor for the OLED.

A pixel circuit, an organic electroluminescent display panel and a display device are provided. The pixel circuit includes a light emitting element, a first capacitor, a reset control module, a drive control module, a compensation control module, and a light emission control module. In a reset phase, the reset control module writes a reset signal at a reset signal end into a second end of the first capacitor. In a compensation phase, the reset control module writes a data signal at a data signal end into a first end of the first capacitor, and the drive control module charges the first capacitor through the compensation control module. In a light emission phase, both the light emission control module and the first capacitor enable the drive control module to drive the light emitting element with a stable current for emission of light.

Growing community of inventors

Shanghai, China

Dan Chen