International Business Machines Corporation

Daminda Dahayanaka

James Albert Slinkman

Philip V Kaszuba

Leon Moszkowicz

Lloyd A Bumm

A method of detecting local mechanical stress in integrated devices is provided, the method comprising: enabling the detection of a photovoltage difference between a scan probe device and a surface portion of an integrated device, the scan probe device being configured to deflect in response to the photovoltage difference; measuring the deflection of the scan probe device in response to the photovoltage difference between the scan probe device and the surface portion of the integrated device; and calculating a local stress level within the integrated device by determining a local work function of the surface portion of the integrated device based upon the deflection of the scan probe device.

Growing community of inventors

Norman, OK, United States of America

Daminda Dahayanaka