Boe Technology Group Co., Ltd.

Fuzhou Boe Optoelectronics Technology Co., Ltd.

Dalin Cui

Jiushi Wang

Shanshan Yang

A coating apparatus includes a coating chamber, and a substrate support structure and a heater in the coating chamber. The substrate support structure includes a plurality of support units. The heater includes a heating plate body having a plurality of through holes and heating filling parts each provided in one of the plurality of through holes, and the plurality of support units are received in the plurality of through holes respectively. In each of the plurality of through holes, one of the plurality of support units is located between one of the heating filling parts and an inner wall of the through hole accommodating the one of the heating filling parts, and the heater further includes connection parts each configured to connect one of the heating filling parts with the inner wall of the through holes accommodating the one of the heating filling parts.

Coating apparatus

A TFT, a manufacturing method thereof, and a display device are provided. The TFT includes a semiconductor layer and an etch-stop layer merely covering a channel region of the semiconductor layer. The semiconductor layer and the etch-stop layer are formed through a single patterning process.

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Beijing, China

Dalin Cui