Entegris, Inc.

Fluoroware, Inc.

Dale A Maenke

Robert F McLoughlin

Marc Brian Laverdiere

Michael C Zabka

John M Hennen

Michael E Clarke

Robert J Nentl

Motoyuki Narisawa

Randy L Karl

Timothy D Schmidt

Kazuo Kaneko

Wiley James Wilkinson

Jacob Littfin

Raymond Wolf

A fire-safe container includes a polymer polymeric IBC within a metal overpack. The metal overpack includes a manway surrounding a plurality of ports. Each port is on a projection form the polymeric IBC that extends into the manway through an aperture. A collar is disposed in each aperture between the projection of the polymeric IBC and the sides of the aperture such that the port is retained in the manway and preventing the port from contacting or collapsing through the aperture. The manway includes a burst disc to release pressure when there is pressure buildup. One of the ports can provide another burst disc to relieve pressure in the polymeric IBC. The polymeric IBC burst disc can release at a pressure that is greater than the pressure at which the manway burst disc releases.

Bulk container having steel overpack

Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.

System and method for non-intrusive thermal monitor

A venting device for a drum. The venting device includes a body having a pair of opposing sides and defining a plurality of vent passages. The vent passages extend through the body and each an opening at each of the pair of opposing sides. The vent passages are spaced apart and arranged around a center portion of the body. A membrane structure is positioned so as to cover the openings of the vent passages on one of the pair of opposing sides of the body. The membrane structure is sealingly affixed to the body portion in an outer sealing band surrounding the openings of the vent passages. The membrane structure may be further affixed with one or more cross sealing bands extending across the membrane. A portion of the membrane structure may be further affixed to the center portion of the body. A protective structure may be attached to the body and positioned over the membrane structure.

Drum vent

A venting device for a drum. The venting device includes a body having a pair of opposing sides and defining a plurality of vent passages. The vent passages extend through the body and each an opening at each of the pair of opposing sides. The vent passages are spaced apart and arranged around a center portion of the body. A membrane structure is positioned so as to cover the openings of the vent passages on one of the pair of opposing sides of the body. The membrane structure is sealingly affixed to the body portion in a sealing band surrounding the openings of the vent passages. A portion of the membrane structure is further affixed to the center portion of the body. A protective structure may be attached to the body and positioned over the membrane structure.

A container for disks has an improved latching mechanism. The container comprises a cassette with sidewalls with slots for holding disks in an axial arrangement, two opposite endwalls each have a U-shaped recess extending downwardly from the open top, a top cover with a rectangular top portion and two end portions extend downwardly to cover the U-shaped recess. The top cover latches to the cassette by way of a latching mechanism which includes a living hinge, an extension portion, and a hook portion all on each end portion. The hook portion cooperates and engages with a cooperative catch member on the cassette. The extension member is under tension to secure the top cover in place. In an alternate embodiment, recesses on the extension portion connect to nubs on the cassettes or on the bottom cover to secure the top cover in place.

Disk container

A cushioned cover for a wafer carrier having panel portions overlying and closing the top of the carrier and end walls with offsets, closing the U-shaped end walls of the carrier, a removable cushioning device in the cover having a single row of hold down elements mounted on flexible horizontal arms allowing up and down movement of the hold down elements to apply pressure against the edges of the wafers, the mounting arms of adjacent hold down elements being attached to opposite sides of the frame of the cushioning device.

Cushioned cover for disk container

A package for storing and transporting a single wafer of silicon or the like which may be 300 millimeters or more in diameter. The package has a U-shaped frame with a ledge on it for supporting the edge of a wafer, the open side of the U-shaped frame permitting insertion and removal of a wafer; a top panel affixed to the U-shaped frame and traversing the U-shaped frame defining a wafer compartment with the frame, and confining the wafer therein; a retainer traversing the open side of the compartment to obstruct removal of the wafer; wafer clamping devices confronting the ledge to clamp the edge portion of a wafer thereon; an access slot through the ledge portion of the frame to obtain access to the edge of the wafer for lifting it; the entire frame portion being open in a downward direction as to open the lower side of the wafer compartment to allow obtaining access to the wafer; the frame also having stacking ribs and grooves; a robot handle on the top panel and an adjacent operator for the retainer to also be operated by a robot.

Single wafer robotic package

A disk shipper assembly consists of a bottom and a cover which mates therewith in latching engagement. The bottom and cover can be handled, as a complete package, by its constituent components and in assembly and disassembly entirely by robotics. The shipper bottom is configured to permit ID or OD handling of the disk contents. The bottom is further configured to be compatible with certain existing disk carriers in manually transferring the disk content to the carrier and vice versa. Since the particular disk carrier with which the bottom of the disk shipper is compatibly designed prohibits external diameter handling, the novel disk shipper bottom facilitates transposing the disks from the carrier into a configuration that permits both ID and OD handling.

Growing community of inventors

Chaska, MN, United States of America

Dale A Maenke