Gigaphoton Inc.

Daisuke Tei

Osamu Wakabayashi

Keita Kouzai

A gas laser apparatus includes a chamber; a window provided in the chamber; an optical path tube connected to the chamber; a gas supply port that supplies a purge gas into the optical path tube; an exhaust port that exhausts a gas in the optical path tube; and a control unit, the exhaust port including a main exhaust port provided in the optical path tube, and an auxiliary exhaust port provided in the optical path tube upstream of a flow of the gas in the optical path tube with respect to positions of the window and the main exhaust port, the control unit causing the gas to be exhausted through the main exhaust port before a laser beam is emitted from the chamber and causing the gas to be exhausted through the auxiliary exhaust port in at least a partial period when the laser beam is emitted.

Gas laser apparatus, laser beam emitting method of gas laser apparatus, and electronic device manufacturing method

A gas laser apparatus includes an enclosure, a window holder, a window, and a sealing member. The window holder further having an extending surface located on the side toward which reflected light travels, the reflected light being reflected off the window, the extending surface being continuous with the end surface and extending in a direction away from the window, the extending surface irradiated with the reflected light. A line is obtained by symmetrically folding back the optical axis of the reflected light at the position, on the extending surface, that is irradiated with the reflected light with respect to a reference line passing through the irradiated position and perpendicular to the extending surface. The lineextends across a normal to the window in the direction from the extending surface toward the window from the side facing the outer circumference of the window toward the center axis of the window.

Gas laser apparatus and electronic device manufacturing method

A laser apparatus including an optical element made of a CaFcrystal and configured to transmit an ultraviolet laser beam obliquely incident on one surface of the optical element, the electric field axis of the P-polarized component of the laser beam propagating through the optical element coinciding with one axis contained in &#x3c;111&#x3e; of the CaFcrystal, with the P-polarized component defined with respect to the one surface. A method for manufacturing an optical element, the method including causing a seed CaFcrystal to undergo crystal growth along one axis contained in &#x3c;111&#x3e; to form an ingot, setting a cutting axis to be an axis inclining by an angle within 14.18&#xb1;5&#xb0; with respect to the crystal growth direction toward the direction of another axis contained in &#x3c;111&#x3e;, which differs from the crystal growth direction, and cutting the ingot along a plane perpendicular to the cutting axis.

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Oyama, Japan

Daisuke Tei