Murata Manufacturing Co., Ltd.

Daisuke Tamasaki

Kenichi Uesaka

A surface acoustic wave device includes a piezoelectric substrate, an IDT electrode provided on the piezoelectric substrate, a first dielectric layer, and a second dielectric layer. The first dielectric layer is provided on the piezoelectric substrate and made of silicon oxide. The second dielectric layer is provided on the first dielectric layer and has an acoustic velocity greater than that of the first dielectric layer. A third dielectric layer is provided between the first dielectric layer and the piezoelectric substrate, and arranged to cover a surface of the piezoelectric substrate and an upper surface and side surfaces of the IDT electrode.

Surface acoustic wave device

A surface acoustic wave filter device uses a Rayleigh wave as a main mode, and includes a ladder type surface acoustic wave filter unit. A thickness of a dielectric layer in a surface acoustic wave resonator configuring a series arm resonator is different from thickness of a dielectric layer in a surface acoustic wave resonator configuring a parallel arm resonator. A propagation orientation of a surface acoustic wave in the surface acoustic wave resonator configuring the series arm resonator is different from a propagation orientation of a surface acoustic wave in the surface acoustic wave resonator configuring the parallel arm resonator.

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Nagaokakyo, Japan

Daisuke Tamasaki