Sumitomo Heavy Industries, Ltd.

Daisuke Shinohira

Takashi Ikeda

Hidehiko Mori

Yasushi Koyanagawa

Doutaro Usui

Dotaro Usui

Masanobu Sugimine

Dotaru Usui

Tatsuro Kato

A linear motor cooling structure for cooling a coil constituting a driving section of a linear motor includes a flat plate cooling section which forms a flow path for cooling water for cooling the coil in an inside between a plurality of flat plate members by overlapping the plurality of flat plate members, wherein the flat plate cooling section includes an inflow opening for inflow of the cooling water and an outflow opening for outflow of the cooling water, which are respectively provided at both ends thereof, and the flat plate cooling section comes into close contact with the coil.

Linear motor cooling structure

A linear motor cooling structure includes an inflow section for inflow of cooling water, an outflow section for outflow of the cooling water, and a flat plate cooling section which includes an inflow opening for inflow of the cooling water from the inflow section, an outflow opening for outflow of the cooling water to the outflow section, and a flow path which makes the cooling water which has flowed in from the inflow opening flow through an inside thereof and flow out from the outflow opening, wherein the inflow section, the flat plate cooling section, and the outflow section are connected, and the inflow section and the inflow opening communicate with each other and also the outflow opening and the outflow section communicate with each other.

A linear motor can include a coil part having a plurality of coils forming a coil line; a magnet yoke part having a plurality of permanent magnets facing the coil line; and a coil cooling part configured to cool the coil part. The coil cooling part can include a cooling panel having a heat conductive element, the heat conductive element transferring heat of the coil part to an outside; and a heat radiation part connected to the cooling panel, the heat radiation part being configured to radiate the heat transferred from the heat conductive element to the outside.

Linear motor and stage device using the linear motor

A terminal table unit includes: a terminal table () having a metal terminal () at its lower surface for connecting a lead wire (); an insulation plate () adhered to the lower surface of the terminal table and having a hole (-) at a portion corresponding to the portion containing a metal terminal and its surrounding region; and a metal plate () having an upper surface adhered to the lower surface of the insulation plate and having a through hole (-) reaching from the upper surface to the lower surface. Through the through hole (-), the lead wire is brought out to the lower surface of the metal plate. The terminal unit has a contact surface between the insulation plate containing the hole (-) and the terminal table, a contact surface between the insulation plate and the metal plate, and the through hole (-) which are filled with adhesive and unified by a bolt ().

Waterproof terminal block unit with insulating plate

A coil in a coil unit for a linear motor is evenly cooled in the lengthwise direction to reduce an influence of heat on the outside from the coil unit. The coil unit includes the plate-shape coil extending in a traveling direction of the linear motor, a shell for internally storing the coil while maintaining a predetermined gap to the coil, and leading a refrigerant through the gap to cool the coil, a main flow passage formed inside the shell while extending in a lengthwise direction X of the coil, and leading the refrigerant supplied from the outside into itself, and a plurality of branch flow passages formed at a predetermined interval in the lengthwise direction X on the main flow passage for leading out the refrigerant led into the main flow passage in a widthwise direction Y of the coil. The refrigerant led out from the branch flow passages after having flown through the main flow passage flows into the gap between the shell and the coil, and cools the coil along the widthwise direction Y.

Coil unit for linear motor

In a thrust ripple measuring apparatus for use in a linear motor, a slave linear motor as a subject to be measured is coupled with a master linear motor through a non-contact type stage mechanism. A processing unit is supplied with speed-induced-voltages detected by a voltage detector and a moving speed of the slave linear motor detected by a speed detector and calculates a per-phase induced voltage constant from the ratio of the speed-induced-voltage of each phase and the moving speed and further calculates a thrust constant and a thrust ripple from the calculated per-phase induced voltage constant.

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Yokosuka, Japan

Daisuke Shinohira