Hitachi, Ltd.

Renesas Electronics Corporation

Nippon Kayaku Kabushiki Kaisha

Nippon Kayaku Kabushiki

Daisuke Ono

Tatsuhiko Miura

Katsuhiro Mitsui

Hiroyuki Matsumoto

Yuji Takahashi

Takashi Sato

Tsuyoshi Kachi

Noriko Kajiura

Yutaka Ishii

Yoshio Fukayama

Yuki Ito

Takao Kidani

Takayoshi Matsushita

Isao Furuse

Yumi Shiratori

Yasuaki Ishiguro

Kazuya Sekiguchi

Tomokuni Chino

Yoshihiro Kainuma

The present invention makes it possible to reliably verify irradiation with a particle beam in accordance with a selected irradiation technique. A particle beam therapy system includes a charged particle beam generator accelerating the particle beam, an irradiator irradiating a target with the particle beam accelerated by the charged particle beam generator, and a controller controlling the charged particle beam generator and the irradiator. The controller controls the charged particle beam generator and the irradiator so as to irradiate the target with the particle beam through switching between at least two different irradiation techniques, and furthermore, after switching between the two irradiation techniques, controls the charged particle beam generator and the irradiator to perform tentative irradiation with the charged particle beam in accordance with one of the irradiation techniques switched, to verify the particle beam.

Particle beam therapy system and particle beam therapy method

A treatment bed arranged in a tip direction of an irradiation nozzle and constructed movably, a treatment information system that manages prescription data, a treatment control system that receives a target position stored in the treatment information system to cause a main display system to display the target position, a pendant to input a movement command for the treatment bed, the main display system that receives the target position of the treatment bed from the treatment control system and displays an actual position of the treatment bed, and a patient positioning support system that calculates correction values for the target position thereof to provide the correction values to the treatment control system and the pendant are included, wherein the treatment control system sends the target position thereof to the treatment information system at a period shorter than an operation sequence thereof and stores initial values to be sent in advance.

Particle therapy system

An aqueous black ink composition that contains a colorant represented by formula (1) and one or more colorants (B-a) to (B-t). The ink composition is stable even when stored for a long period of time, has a low chroma and tint-free neutral black-to-gray color even when printing a deep color or light color, has a high printed image density, exhibits no change in hue when printed on different media, and produces a black recorded image having particularly excellent recorded image color development properties, light resistance, ozone gas resistance and moisture resistance. 

Ink composition, ink jet recording method using same, and colored material

Provided is a manufacturing method of a semiconductor device wherein the generation of voids is prevented in aluminum-based electrodes or the like. The method is suitable for manufacturing a semiconductor device adapted for vehicles, which is required to have a high reliability. However, it is very difficult that power semiconductor devices such as power MOSFETs, in particular, trench gate type power MOS devices are formed without having any void since the thickness of aluminum-based electrodes thereof is as large as about 3500 to 5500 nm (2.5 &#x3bc;m or more). In the present invention, a method is provided wherein at the time of forming an aluminum-based electrode metal film positioned over a wafer and having a thickness of 2.5 &#x3bc;m or more over a highland/lowland-repeated region in a line and space form by sputtering, the temperature of the wafer is set to 400&#xb0; C. or higher and lower than 500&#xb0; C.

Semiconductor device and a method of manufacturing the same

Provided is a manufacturing method for improving the reliability of a semiconductor device having a back electrode. After formation of semiconductor elements on the surface of a silicon substrate, the backside surface thereof, which is opposite to the element formation surface, is subjected to the following steps in a processing apparatus. After deposition of a first metal film over the backside surface of the silicon substrate in a first chamber, it is heat treated to form a metal silicide film. Then, a nickel film is deposited in a third chamber, followed by deposition of an antioxidant conductor film in a second chamber. Heat treatment for alloying the first metal film and the silicon substrate is performed at least prior to the deposition of the nickel film. The first chamber has therefore a mechanism for depositing the first metal film and a lamp heating mechanism.

Manufacturing method of semiconductor device and semiconductor manufacturing apparatus therefor

The present invention relates to an anthrapyridone compound represented by the following formula (1): wherein, n represents an integer number of 1 to 3, Rrepresents a hydrogen atom, an alkyl group or the like, Rrepresents a hydrogen atom or a methoxy group, Rrepresents an anilino group having, as a substituent, at least one group selected from the group consisting of sulfo group, a carboxy group, an alkoxy group, a carbamoyl group, an cyano group, an alkyl group, an anilino group, a phenoxy group, an amino group, a hydroxy group and a mercapto group, an unsubstituted anilino group or the like, or a salt thereof, and provides a magenta coloring matter (compound) having high solubility in water and a hue and vividness which are suitable for inkjet recording and being excellent in fastnesses such as light fastness, moisture fastness and ozone gas fastness on recorded matter; and a magenta ink composition containing it.

Anthrapyridone compound or salt thereof, magenta ink composition and colored product

Growing community of inventors

Tokyo, Japan

Daisuke Ono