Seiko Instruments Inc

Ablic Inc.

Daisuke Okano

Satoshi Machida

Masakazu Sugiura

Tsutomu Tomioka

Atsushi Igarashi

Masahiro Yokomichi

Daisuke Muraoka

Hideyuki Sawai

Nao Otsuka

Mihoko Yamashita

Provided is an overheat detection circuit configured to accurately detect a temperature of a semiconductor device even at high temperature and thus avoid outputting an erroneous detection result. The overheat detection circuit includes: a PN junction element, being a temperature sensitive element; a constant current circuit configured to supply the PN junction element with a bias current; a comparator configured to compare a voltage generated at the PN junction element and a reference voltage; a second PN junction element configured to cause a leakage current to flow through a reference voltage circuit at high temperature; and a third PN junction element configured to bypass a leakage current of the constant current circuit at the high temperature.

Overheat detection circuit and semiconductor device

In order to provide a reticle capable of increasing the number of chips per wafer and of enabling highly accurate alignment, and an exposure method using the reticle, a first alignment mark arrangement region () and a second alignment mark arrangement region () are provided on both sides of a multi-chip region () so that a sum of a size of the first alignment mark arrangement region and a size of the second alignment mark arrangement region is made the same as a size of a chip region ().

Reticle for projection exposure apparatus and exposure method using the same

Provided is a photoelectric conversion device for outputting an output voltage according to incident light, including photoelectric conversion unit for holding an optical charge generated by the incident light, a signal processing circuit impressed with a reference voltage for outputting the output voltage according to the incident light by applying a predetermined process to an output signal of the photoelectric conversion unit, and a switch provided between a terminal externally supplied with the reference voltage, and the signal processing circuit.

Photoelectric conversion device including a switch between reference voltage and a signal processing circuit

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Chiba, Japan

Daisuke Okano