Hokuriku Electric Industry Co., Ltd.

Daisuke Kuwahara

Tetsuji Imamura

Takayuki Nakano

Takahiro Ishibashi

Provided herein are a gas sensor element in which deformation of a sensitive portion due to stress may be reduced and a method of manufacturing the gas sensor element. A base insulating layerincluding a heater wiring patternis formed on a front surfaceA of a support. The base insulating layerincludes a fixed portionfixed to the front surfaceA of the support, and a nonfixed portionlocated over an opening portion. A cavity portionhaving the opening portionis formed in the support. An electrode wiring patternand a sensitive filmare formed over a central portionof the nonfixed portionof the base insulating layer. The nonfixed portionincludes the central portionand a plurality of connecting portionsconnecting the central portionand the fixed portion. Four connecting portionseach include a base portionand an extended portion. The base portionof each connecting portionis formed to extend along an edge portionA of the opening portion. Each extended portionis formed to extend from the base portionto the central portionto be connected to the central portion. The connecting portionsare formed such that the maximum width Wof each base portionis larger than the maximum width Wof each extended portions

Gas sensor element and manufacturing method of the same

Provided is a manufacturing method of a metal oxide semiconductor material for gas sensors by which an oxide precursor and noble metal colloid particles will not readily cohere in the manufacturing process. The manufacturing process implements a precursor solution synthesis stepof synthesizing an oxide precursor solution in which an oxide precursor is dispersed, a pH adjustment stepof adjusting the pH of the oxide precursor solution, a precursor-colloid dispersion preparation stepof preparing an oxide precursor-noble metal colloid dispersion in which the oxide precursor and the noble metal colloid are dispersed substantially uniformly, a purifying stepof purifying the oxide precursor-noble metal colloid dispersion to obtain a purified oxide precursor noble metal colloid dispersion, and a freeze-drying stepof freeze-drying an precipitate of the purified oxide precursor-noble metal colloid dispersion.

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Toyama, Japan

Daisuke Kuwahara