Shin-etsu Chemical Co., Ltd.

National Institute of Advanced Industrial Science and Technology

Kanazawa University

National University Corporation Kanazawa University

Daisuke Kuwabara

Masahiko Ogura

Hitoshi Noguchi

Toshiharu Makino

Satoshi Yamasaki

Hiromitsu Kato

Shozo Shirai

Daisuke Takeuchi

Norio Tokuda

Takao Inokuma

Tsubasa Matsumoto

Hiroyuki Kawashima

A method for manufacturing a diamond substrate, including: a first step of preparing patterned diamond on a foundation surface, a second step of growing diamond from the patterned diamond prepared in the first step to form the diamond in a pattern gap of the patterned diamond prepared in the first step, a third step of removing the patterned diamond prepared in the first step to form a patterned diamond composed of the diamond formed in the second step, and a fourth step of growing diamond from the patterned diamond formed in the third step to form the diamond in a pattern gap of the patterned diamond formed in the third step. There can be provided a method for manufacturing a diamond substrate which can sufficiently suppress dislocation defects, a high-quality diamond substrate, and a freestanding diamond substrate.

Diamond substrate and freestanding diamond substrate

Method for manufacturing diamond substrate

The present invention provides a method for manufacturing a diamond substrate, including: a first step of preparing patterned diamond on a foundation surface, a second step of removing a foreign substance adhered on a wall of the patterned diamond prepared in the first step, and a third step of growing diamond from the patterned diamond prepared in the first step to form the diamond in a pattern gap of the patterned diamond prepared in the first step. There can be provided a method for manufacturing a diamond substrate with few dislocation defects, in which generation of abnormal growth particles are suppressed.

Growing community of inventors

Tsukuba, Japan

Daisuke Kuwabara