Tokyo Electron Limited

Panasonic Intellectual Property Management Co., Ltd.

Daisuke Ikemoto

Yuji Mimura

Takao Asada

Takahiro Masunaga

Shigeto Tsuruta

Tetsuya Maki

Tatsumi Oonishi

Kenji Matsui

Takayuki Satoi

A coating apparatus includes: a slit nozzle including a retention chamber that retains the coating material; a moving mechanism that moves the slit nozzle; a pressure regulation unit that regulates a pressure inside the retention chamber; and a control unit that controls the moving mechanism and the pressure regulation unit to relatively move the slit nozzle with respect to the substrate while changing the pressure inside the retention chamber toward an atmospheric pressure from a negative pressure, wherein the control unit is configured to control the pressure regulation unit so that a change in the pressure inside the retention chamber in a start zone including a coating start position and an end zone including a coating end position becomes slower than a change in the pressure inside the retention chamber in a middle zone except the start zone and the end zone.

Coating apparatus

Growing community of inventors

Kumamoto, Japan

Daisuke Ikemoto