Kabushiki Kaisha Toshiba

Toshiba Memory Corporation

Kioxia Corporation

Daisuke Hagishima

Atsuhiro Kinoshita

Hiroshi Watanabe

Katsuhiko Hieda

Masaki Kondo

Takashi Kobayashi

Keiji Hosotani

Akira Takashima

Eietsu Takahashi

Kiwamu Sakuma

Yoshifumi Nishi

Kazutaka Ikegami

Yoichi Minemura

Kazuya Matsuzawa

Fumitaka Arai

Shinobu Fujita

Shinichi Yasuda

Masahiro Kiyotoshi

Shigeki Kobayashi

Shosuke Fujii

Koichi Muraoka

Tetsufumi Tanamoto

Shinji Mori

Takahiro Kurita

Atsushi Takahashi

Yuta Saito

Yusuke Umezawa

Kazunori Harada

According to one embodiment, a semiconductor memory device includes: a first semiconductor layer; first and second insulating layers in contact with the first semiconductor layer; a second semiconductor layer in contact with the first insulating layer; a third semiconductor layer in contact with the second insulating layer; a first conductor; a third insulating layer in contact with the first conductor; a fourth insulating layer provided between the second semiconductor layer and the third insulating layer; a first charge storage layer provided between the second semiconductor layer and the fourth insulating layer; and a fifth insulating layer provided between the second semiconductor layer and the first charge storage layer. The second semiconductor layer, the first conductor, the third to fifth insulating layers, and the first charge storage layer function as a first memory cell.

Semiconductor memory device

According to one embodiment, a semiconductor memory device includes first and second semiconductor layers and a first conductive layer. The first and second semiconductor layers extend in a first direction. The second semiconductor layer is stacked above the first semiconductor layer in a second direction intersecting the first direction. The first conductive layer intersects the first and second semiconductor layers and extends in the second direction. The first conductive layer includes first and second portions intersecting the first and second semiconductor layers respectively. A width of the first portion in the first direction is smaller than a width of the second portion in the first direction. A thickness of the first semiconductor layer in the second direction is larger than a thickness of the second semiconductor layer in the second direction.

According to one embodiment, a semiconductor memory device includes: a memory string including first and second select transistors and memory cell transistors; a bit line connected to the first select transistor; word lines which are connected to gates of the memory cell transistors, respectively; first and second select gate lines which are connected to gates of the first and second select transistors, respectively; a first contact plug connected to the first select gate line; a first wiring layer provided on the first contact plug; a second contact plug connected to the second select gate line; a second wiring layer provided on the second contact plug; and a row decoder connected to the first and second wiring layers. The row decoder applies different voltages to the first select gate line and the second select gate line.

Semiconductor memory device applying different voltages to respective select gate lines

According to one embodiment, selection gates include an extract portion, a first portion, and a second portion. A predetermined potential is transmitted from the extract portion to the first portion. The predetermined potential is transmitted from the extract portion to the second portion with a delayed time to the first portion. A threshold voltage of a first selection transistor is different from a threshold voltage of a second selection transistor. The first selection transistor includes a semiconductor body disposed in the first portion as a channel. The second selection transistor includes the semiconductor body disposed in the second portion as a channel.

Three-dimensional non-volatile memory device with cut off time control

According to one embodiment, a semiconductor memory device includes a stacked body including a first stacked region, and a first structure body. The first stacked region includes first and second selection gate electrodes, first electrodes arranged in a first direction and provided between the first and second selection gate electrodes, second electrodes arranged in the first direction and provided between the second selection gate electrode and the first electrodes, and third electrodes arranged in the first direction and provided between the first electrodes and the second electrodes. A first spacing between two mutually-adjacent first electrodes is wider than a third spacing between two mutually-adjacent third electrodes. A second spacing between two mutually-adjacent second electrodes is wider than the third spacing.

According to one embodiment, a nonvolatile semiconductor memory device includes a fin-type stacked layer structure in which a first insulating layer, a first semiconductor layer, . . . an n-th insulating layer, an n-th semiconductor layer, and an (n+1)-th insulating layer (n is a natural number equal to or more than 2) are stacked in order thereof in a first direction perpendicular to a surface of a semiconductor substrate and which extends in a second direction parallel to the surface of the semiconductor substrate, first to n-th memory strings which use the first to n-th semiconductor layers as channels respectively, a common semiconductor layer which combines the first to n-th semiconductor layers at first ends of the first to n-th memory strings in the second direction.

Nonvolatile semiconductor memory device and method of manufacturing the same

According to one embodiment, a nonvolatile semiconductor memory includes first to n-th (n is a natural number not less than 2) semiconductor layers in a first direction and extend in a second direction, and the semiconductor layers having a stair case pattern in a first end of the second direction, a common semiconductor layer connected to the first to n-th semiconductor layers commonly in the first end of the second direction, first to n-th layer select transistors which are provided in order from the first electrode side between the first electrode and the first to n-th memory strings, and first to n-th impurity regions which make the i-th layer select transistor (i is one of 1 to n) a normally-on state in the first end of the second direction of the i-th semiconductor layer.

Nonvolatile semiconductor memory

An aspect of the present embodiment, there is provided a nonvolatile programmable logic switch including a first memory cell transistor, a second memory cell transistor, a pass transistor and a first substrate electrode applying a substrate voltage to the pass transistor, wherein a writing voltage is applied to the first wiring, a first voltage is applied to one of a second wiring and a third wiring and a second voltage which is lower than the first voltage is applied to the other of the second wiring and the third wiring, and the first substrate voltage which is higher than the second voltage and lower than the first voltage is applied to a well of the pass transistor, when data is written into the first memory cell transistor or the second memory cell transistor.

Nonvolatile programmable logic switch

A nonvolatile memory according to an embodiment includes at least one memory cell including: a variable resistance memory comprising one end connected to a first terminal, and the other end connected to a second terminal, a drive voltage being applied to the first terminal; and a diode comprising a cathode connected to the second terminal, and an anode connected to a third terminal, a ground potential being applied to the third terminal. An output of the memory cell is output from the second terminal, the output of the memory cell depends on a resistance state of the variable resistance memory.

Nonvolatile memories and reconfigurable circuits

A nonvolatile programmable logic switch according to an embodiment includes: a memory cell transistor including: a first source region and a first drain region of a second conductivity type formed at a distance from each other in a first semiconductor region of a first conductivity type; a first insulating film, a charge storage film, a second insulating film, and a control gate stacked in this order and formed on the first semiconductor region between the first source region and the first drain region; a pass transistor including: a second source region and a second drain region of a second conductivity type formed at a distance from each other in a second semiconductor region of the first conductivity type; a third insulating film, a gate electrode stacked in this order and formed on the second semiconductor region between the second source region and the second drain region, the gate electrode being electrically connected to the first drain region; and an electrode for applying a substrate bias to the first and second semiconductor regions.

A nonvolatile programmable logic switch according to an embodiment includes: a first semiconductor region of a first conductivity type and a second semiconductor region of a second conductivity type; a memory cell transistor including a first insulating film formed on the first semiconductor region, a charge storage film formed on the first insulating film, a second insulating film formed on the charge storage film, and a control gate formed on the second insulating film; a pass transistor including a third insulating film formed on the second semiconductor region, and a gate electrode formed on the third insulating film and electrically connected to the first drain region; a first electrode applying a substrate bias to the first semiconductor region, the first electrode being formed in the first semiconductor region; and a second electrode applying a substrate bias to the second semiconductor region, the second electrode being formed in the second semiconductor region.

Nonvolatile programmable logic switches and semiconductor integrated circuit

An aging device includes a semiconductor substrate, an element isolation insulating layer which is formed in a recessed portion of the semiconductor substrate and which has an upper surface higher than an upper surface of the semiconductor substrate, first and second element regions isolated by the element isolation insulating layer, first and second diffusion layers formed in the semiconductor substrate in the first element region, a first gate insulating film formed on the semiconductor substrate between the first and second diffusion layers, a second gate insulating film formed on the semiconductor substrate in the second element region, and a floating gate electrode formed on the first and second gate insulating films and formed to extend from the first element region to the second element region. The deepest portions of the first and second diffusion layers are isolated from the element isolation insulating layer.

Aging device

An aging device according to an embodiment of the present invention includes a semiconductor substrate, first and second diffusion layers provided in a first element region, a floating gate provided above a channel region between the first and second diffusion layers, and a control gate electrode provided beside the floating gate with an interval in the lateral direction. A coupling capacitance between the floating gate and the control gate electrode is larger than a coupling capacitance between the floating gate and the semiconductor substrate.

A nonvolatile semiconductor storage device includes a semiconductor substrate; a plurality of isolation regions formed in the semiconductor substrate; an element-forming region formed between adjacent isolation regions; a first gate insulating film provided on the element-forming region; a floating gate electrode which is provided on the first gate insulating film and in which a width of a lower hem facing the element-forming region is narrower than a width of the element-forming region in a section taken in a direction perpendicular to a direction in which the isolation regions extend; a second gate insulating film provided on the floating gate electrode; and a control gate electrode provided on the second gate insulating film.

Growing community of inventors

Tokyo, Japan

Daisuke Hagishima