Toyohashi University of Technology

Denso Corporation

Daisuke Akai

Makoto Ishida

Kazuaki Sawada

Hiroyuki Wado

Noriyuki Matsushita

Yiping Guo

Mikako Yokawa

Keisuke Hirabayashi

A piezoelectric element includes a substrate having a first surface with a predetermined orientation; a lower electrode layered on the first surface of the substrate; a piezoelectric thin film layered on the lower electrode and having a piezoelectric body; and an upper electrode layered on the piezoelectric thin film. A voltage is to be impressed between the lower electrode and the upper electrode to deform the piezoelectric thin film. The piezoelectric thin film is epitaxially grown on the lower electrode using a physical vapor deposition or a chemical vapor deposition.

Piezoelectric element and method of producing the same

An object of the present invention is to provide a ferroelectric element having excellent properties, which includes a monocrystalline film of &#x3b3;-AlOformed as a buffer layer on a silicon substrate. The monocrystalline &#x3b3;-AlO film is formed on the silicon substrate which is the lowermost layer of an MFMIS structure. On the monocrystalline &#x3b3;-AlOfilm, there is formed an electrically conductive oxide in the form of a LaNiO3 film as a lower electrode. On the LaNiO3 film, there is formed a PZT thin film which is a ferroelectric material. On the PZT thin film, there is formed a Pt film as an upper electrode.

Laminar structure on a semiconductor substrate

A semiconductor element, a semiconductor sensor, and a semiconductor memory element are provided, in which an MFMIS structure having a lower electrode and an integrated circuit can be integrated. An epitaxially grown &#x3b3;-AlOsingle crystal film () is disposed on a semiconductor single crystal substrate (), and an epitaxial single crystal Pt thin film () is disposed on the &#x3b3;-AlOsingle crystal film ().

Ultrasonic sensor comprising a metal/ferroelectric/metal/insulator/semiconductor structure

Growing community of inventors

Hoi-gun, Japan

Daisuke Akai