Kabushiki Kaisha Toshiba

Ebara Corporation

Daisaku Fukuoka

Kenya Ito

Tamami Takahashi

Atsushi Shigeta

Takeo Kubota

Gen Toyota

A polishing apparatus has a polishing tape (), a supply reel () for supplying the polishing tape () to a contact portion () at which the polishing tape () is brought into contact with a notch portion () of a substrate (), and a take-up reel () for winding up the polishing tape () from the contact portion (). The polishing apparatus also has a first guide portion () having as guide surface () for supplying the polishing tape () directly to the contact portion (), and a second guide portion () having a guide surface for supplying the polishing tape () tot the take-up reel (). The guide surface () of the first guide portion () and/or the guide surface of the second guide portion () has a shape corresponding to a shape of the notch portion () of the substrate ().

Growing community of inventors

Tokyo, Japan

Daisaku Fukuoka