Nissin Ion Equipment Co., Ltd.

Daiki Takashima

Ippei Nishimura

Provided is a mass separator () for performing mass separation for an ion beam (IB). The mass separator () includes a transfer structure () that is a component of a yoke () and move at least one of an upper yoke () positioned over the beam path (L), a lower yoke () positioned under the beam path (L), and a side yoke () positioned at a side of the beam path (L) between a normal position (P) in the traveling of the ion beam (IB) and a retracted position (Q) that does not overlap with at least a part of the normal position (P); the yoke () is surrounding the beam path (L) and is made of a magnetic body.

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Kyoto, Japan

Daiki Takashima