Japan Aerospace Exploration Agency

Kasuga Denki, Inc.

Daiki Koda

Hitoshi Kuninaka

Satoshi Hosoda

Nobuo Nomura

Tomofumi Mogami

Takato Morishita

Kazuki Minemura

A charge neutralizer that includes a vacuum chamber which is capable of having a charged object installed therein and includes a high vacuum processing unit that performs vapor deposition, and a plasma generator configured to supply plasma caused by an electron cyclotron resonance to an inside of the vacuum chamber. The plasma generator includes a plasma source configured to generate the plasma, and a flange configured to install the plasma source inside the vacuum chamber.

Charge neutralizer and plasma generator

Growing community of inventors

Tokyo, Japan

Daiki Koda