Asahi Kasei Kabushiki Kaisha

Daiki Hirashima

Hidenori Mochizuki

Takanori Murakami

Seiichi Kato

Kazuma Komatsu

A gas sensor includes an electrically conductive membrane that bends with an applied surface stress, a fixing member disposed outside the membrane, a coupling portion that couples together the membrane and the fixing member, a flexible resistor whose resistance value changes in accordance with a deflection that occurs in the coupling portion, a conductive support substrate connected to the fixing member and disposed with a gap between the membrane and the coupling portion, a receptor which is formed on an area including the center of a surface on one side of the membrane which is opposite to the other side facing the support substrate, and deforms in accordance with a substance adsorbed, a first terminal capable of applying a first potential to the membrane, a second terminal capable of applying a second potential to the support substrate, and an insulating portion electrically insulating the fixing member from the support substrate.

Gas sensor, component detection apparatus including gas sensor, inspection system including gas sensor, gas sensor inspection method, and gas sensor manufacturing method

Provided are a surface stress sensor that enables deterioration in measurement precision to be suppressed and a method for manufacturing the same. A surface stress sensor includes: a membrane configured to be bent by applied surface stress; a frame member configured to surround the membrane with gaps interposed therebetween when viewed from the thickness direction of the membrane; at least a pair of coupling portions configured to couple the membrane and the frame member; a flexible resistor configured to be disposed on at least one of the coupling portions and have a resistance value that changes according to bending induced in the coupling portion; and a support base member configured to be connected to the frame member and overlap the frame member when viewed from the thickness direction of the membrane, in which a cavity portion is disposed between the membrane and the support base member.

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Tokyo, Japan

Daiki Hirashima