Tosoh Corporation

Sagami Chemical Research Institute

Daiji Hara

Mitsuhiro Mori

Yozo Kondo

Keisuke Yoshida

Morihiko Sato

Masato Shimizu

Tomoyuki Kinoshita

Yasushi Hara

Ken-ichi Tada

Mayumi Takamori

Sachio Asano

Ryoji Tanaka

Masahiro Adachi

Ken-Ichi Tada

The present invention relates to a film composed of a carbon-containing silicon oxide formed by CVD using, as the raw material, an organosilicon compound having a secondary hydrocarbon group directly bonded to at least one silicon atom and having an atomic ratio of 0.5 or less oxygen atom with respect to 1 silicon atom, which is used as a sealing film for a gas barrier equipment and materials, an FPD device, a semiconductor device and the like.

Film deposition material, sealing film using the same and use thereof

A compound useful for the manufacture of a Group 5 metal oxide film is provided. The compound is a Group 5 metal oxo-alkoxo complex represented by the following formula (A), and after preparing a film-forming material solution containing the compound and an organic solvent, a Group 5 metal oxide film can be manufactured using the film-forming material solution:M(&#x3bc;-O)(&#x3bc;-O)(&#x3bc;-O)(&#x3bc;-OR)(OR)(ROH)XY&#x2003;&#x2003;(A)(wherein M represents a niobium atom, etc.; Rrepresents an alkyl group; X represents an alkylenedioxy group; Y represents a carboxy group, etc.; &#x3b1; represents an integer of 3 to 10; &#x3b2; represents 0 or 1; &#x3b3; represents an integer of 0 to 8; &#x3b4; represents an integer of 2 to 9; &#x2208; represents an integer of 0 to 6; &#x3b6; represents an integer of 6 to 16; &#x3b7; represents an integer of 0 to 4; &#x3b8; represents an integer of 0 to 2; and &#x3b9; represents an integer of 0 to 6).

Group 5 metal oxo-alkoxo complex, method for producing same, and method for manufacturing group 5 metal oxide film

A material suitable for sealing an LED element or for a gas barrier layer for a resin component, and an LED device, an FPD device and a semiconductor device using it. A process for producing a polymer composition, which includes mixing and reacting as component (A), an unsaturated group-containing siloxane compound of the following formula (1): wherein the siloxane structure is a chain or cyclic structure, as component (B), a siloxane compound having a structure of the following formula (2) wherein hydrogen is directly bonded to silicon, wherein the siloxane structure is a chain or cyclic structure, as component (C), at least one member selected from the group consisting of organic metal compounds of Group 1, 2, 12, 13 and 14 metals of the periodic table, and as component (D), a metal catalyst of Group 8, 9 or 10 metal of the periodic table.

Typical metal containing polysiloxane composition, process for its production, and its uses

The present invention has the objects to provide a novel material for forming Si-containing film, especially a material containing a cyclic siloxane compound suitable to a PECVD equipment for low dielectric constant insulating film, and to provide an Si-containing film using the same, and a semiconductor device containing those films. The present invention relates to a material for forming Si-containing film, containing a cyclic siloxane compound represented by the following general formula (1) (In the formula, A represents a group containing at least one selected from the group consisting of an oxygen atom, a boron atom and a nitrogen atom, n is 1 or 2, and x is an integer of from 2 to 10.), and its use.

Cyclic siloxane compound, a material for forming Si-containing film, and its use

A material for insulating film suitable as an interlayer insulating material for a semiconductor device, from which an insulating film is formed by chemical vapor deposition, and an insulating film formed from such a material and a semiconductor device employing an insulating film, are provided. A material for insulating film comprising an organosilicon compound which is one of an organosilane compound in which a secondary hydrocarbon group and an alkenyl group, or an alkenyl group, is directly bonded to a silicon atom, or an organosiloxane compound in which a secondary hydrocarbon group and/or an alkenyl group is directly bonded to a silicon atom, represented by the formulae (1) to (4), from which an insulating film is formed by chemical vapor deposition of the organosilicon compound: 

Insulating film material containing organic silane or organic siloxane compound, method for producing same, and semiconductor device

An insulating film material formed by chemical vapor deposition, which contains an organic silane compound having such a structure that at least one secondary hydrocarbon group and/or tertiary hydrocarbon group is directly bonded to a silicon atom.

Insulating film material containing an organic silane compound, its production method and semiconductor device

A method for producing a stereoregular polyolefin in the presence of a catalyst comprising a transition metal compound and an organometallic compound, which comprises polymerizing at least one olefin in the presence of a catalyst system comprising:

Method for producing a polyolefin

A method for producing a stereospecific polyolefin in the presence of a catalyst comprising a transition metal compound and an organometallic compound, wherein a catalyst system is used which comprises (A) a solid catalyst component prepared by reacting a homogeneous solution containing (i) at least one member selected from the group consisting of metal magnesium and a hydroxylated organic compound, and oxygen-containing organic compounds of magnesium, (ii) an oxygen-containing organic compound of aluminum and (iii) an oxygen-containing organic compound of titanium, with (iv) at least one aluminum halide compound to obtain a solid product, and further reacting to this solid product, (v) an electron-donative compound and (vi) a titanium halide compound, (B) at least one member selected from the group consisting of organometallic compounds of Groups IA, IIA, IIB, IIIB and IVB of the Periodic Table, and (C) an oxygen-containing organic compound of silicon which has no aromatic substituent and which has at least one hydrocarbon group containing a secondary or tertiary carbon directly bonded to a silicon atom.

Method for producing a stereospecific polyolefin

A method for producing a stereospecific polyolefin in the presence of a catalyst comprising a transition metal compound and an organometallic compound, wherein a catalyst system is used which comprises: (A) a solid catalyst component prepared by reacting (i) a homogeneous solution prepared by reacting (i-1) magnesium and a hydroxylated organic compound, (i-2) an oxygen-containing organic compound of titanium and/or (i-3) an oxygen-containing organic compound of silicon, with an oxygen-containing organic compound of aluminum and/or a boron compound, with (ii) at least one aluminum halide compound to obtain a solid product, reacting to this solid product (iii) an electron-donative compound and (iv) a titanium halide compound to obtain a solid component, and further reacting to this solid component (v) silicon tetrachloride and/or an alkyl-substituted product of silicon tetrachloride, (B) at least one member selected from the group consisting of organometallic compounds of Groups IA, IIA, IIB, IIIB and IVB of the Periodic Table, and (C) an electron-donative compound.

A method for producing a stereospecific polyolefin in the presence of a catalyst comprising a transition metal compound and an organometallic compound, wherein a catalyst system is used which comprises: (A) a solid catalyst component prepared by reacting a homogeneous solution containing (i-1) magnesium and a hydroxylated organic compound, (i-2) an oxygen-containing organic compound of titanium and/or (i-3) an oxygen-containing organic compound of silicon and an oxygen-containing organic compound of aluminum and/or a boron compound, with (ii) at least one aluminum halide compound to obtain a solid product, and further reacting to this solid product (iii) an electron-donative compound, (iv) a titanium halide compound, and (v) ethylene and/or an .alpha.-olefin having at least 3 carbon atoms, (B) at least one member selected from the group consisting of organometallic compounds of Groups IA, IIA, IIB, IIIB and IVB of the Periodic Table, and (C) an electron-donative compound. A highly stereospecific polymer having good configuration of particles can be obtained in good yield by the method of the present invention.

A method for producing a stereoregular polyolefin in the presence of a catalyst comprising a transition metal compound and an organometallic compound, wherein a catalyst system is employed which comprises (i), (ii) and (iii): (A) a solid catalyst component obtained by reacting to a uniform solution containing (i) at least one member selected from the group consisting of metallic magnesium and an organic hydroxide compound and an oxygen-containing organic magnesium compound, (ii) a compound of Group IIIB of the Periodic Table, and (iii) an oxygen-containing organic silicon compound, (iv) at least one aluminum halide, to obtain a solid product, and reacting to the solid product, (v) an electron donative compound, and (vi) a titanium halide compound; (B) at least one member selected from the group consisting of organometallic compounds of metals of Groups IA, IIA, IIB, IIIB and IVB of the Periodic Table; and (C) an electron donative compound.

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Kanagawa, Japan

Daiji Hara