Hitachi, Ltd.

Hitachi High-tech Corporation

Daigo Komesu

Hiroshi Morita

Takashi Doi

Kenji Miyata

Shinji Fujita

Kenji Tanimoto

Keigo Kasuya

Satoshi Ichimura

Li Lu

Soichiro Matsunaga

Shuhei Ishikawa

In an electron source including a suppressor electrode having an opening at one end portion thereof in a direction along a central axis and an electron emission material having a distal end protruding from the opening, the suppressor electrode further includes a receding portion receding to a position farther from the distal end of the electron emission material than the opening in the direction along the central axis at a position in an outer peripheral direction than the opening, and at least a part of the receding portion is disposed within a diameter of 2810 μm from a center of the opening. Accordingly, an electron source, an electron gun, and a charged particle beam device such as an electron microscope using the same, in which a machine difference in a device performance due to an axial shift between the electron emission material and the suppressor electrode is reduced, are implemented.

Electron source, electron gun, and charged particle beam device

An object of the present invention is to provide a stationary induction electric apparatus that can improve insulating performance with a few additional structures. In the stationary induction electric apparatus comprising: an iron core; a low-voltage coil conductorwound on the iron core; an insulatorenclosing the low-voltage coil conductor; and a high-voltage coil conductorwhich is wound on the insulator and to which a voltage is applied from the outside, a first shield conductorwound adjacent to the inner peripheral surface of the insulator, a second shield conductorwound adjacent to the outer peripheral surface of the insulator, one end of the first shield conductor, and one end of the second shield conductor are electrically connected to any region of the high-voltage coil conductor.

Stationary induction electric apparatus

Growing community of inventors

Tokyo, Japan

Daigo Komesu