Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Screen Holdings Co., Ltd. (3 from 1,116 patents)
3 patents:
1. 11804387 - Substrate processing device and substrate processing method
2. 10998203 - Substrate processing device and substrate processing method
3. 10037902 - Substrate processing device and substrate processing method