Horiba Stec, Co., Ltd.

Daichi Kunita

Kazuya Shakudo

Kenichi Oe

Hiroshi Takakura

Atsushi Ieki

Fluid control device

The present invention provides a fluid control valve that improves usability by eliminating misunderstanding of a user. The fluid control valve includes a valve seat, a valve body disposed to be approachable to and separable from the valve seat, an actuator configured to move the valve body in an approaching or separating direction, a positional information detection part configured to detect a value corresponding to a relative position of the valve body with respect to the valve seat, and a position output part configured to set, irrespective of positional information acquired by the positional information detection part at an opening start position of the valve body, the opening start position to position zero.

Fluid control valve and recording medium with control program thereof recorded therein

The present invention is intended to inhibit a communication program from crashing in the case where a power source is turned off while writing or rewriting of a measurement control program from an external device is performed by a communication part, and includes: a first recording part for storing the communication program for controlling the communication part; a second recording part for storing a measurement control program for controlling the measurement control part; and a central processing unit. In this configuration, the communication program stored in the first recording part is configured to be unrewritable by the central processing unit and the measurement control program stored in the second recording part is configured to be rewritable by the central processing unit.

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Kyoto, Japan

Daichi Kunita