Samsung Electronics Co., Ltd.

Dai-Geun Kim

Min-Soo Cho

Jin-Woo Kim

Dong-jun Kim

Jae-Hyun Park

Sang-Wook Park

Chul-soon Kwon

Jae-Min Yu

Eui-Youl Ryu

Don-Woo Lee

Yong-Hee Kim

Kook-Min Kim

Joo-Chan Kim

Sag-Wook Park

Nonvolatile memory cells having a split gate structure and methods of fabricating the same are provided. The nonvolatile memory cells include active regions defined at a predetermined region of a semiconductor substrate. A portion of each of the active regions is etched to form a cell trench region. Insulated floating gates are disposed on a pair of sidewalls parallel with the direction that crosses the active region. A source region is disposed at a bottom surface of the cell trench region. A gap region between the floating gates is filled with a common source line electrically connected to the source region. The common source line is extended along the direction that crosses the active regions. The active regions, which are adjacent to the floating gates, are covered with word lines parallel with the common source line. Drain regions are disposed in the active regions adjacent to the word lines. The drain regions are electrically connected to bit lines that cross over the word lines.

Nonvolatile memory cells having split gate structure and methods of fabricating the same

The method of manufacturing a split gate flash memory device includes the steps of (a) providing a semiconductor substrate of a conductivity type opposite to that of a first junction region; (b) sequentially forming a first dielectric film, a first conductive film, a second dielectric film and a third dielectric film on an overall upper face of the substrate; (c) etching the third dielectric film by a given thickness so as to expose the second dielectric film; (d) removing the exposed second dielectric film, and eliminating the remaining third dielectric film; (e) etching the first conductive film and the second dielectric film by a given thickness so as to partially expose the first conductive line and the first conductive film; (f) forming a fourth dielectric film on a portion of the exposed first conductive line and first conductive film; (g) eliminating the remaining second dielectric film remained, and exposing the first conductive film provided in a lower part thereof; and (h) etching the first dielectric film and the first conductive film exposed by the removal of the second dielectric film using the fourth dielectric film as an etch mask, and forming a second gate dielectric film and a word line.

Method of manufacturing split gate flash memory device

In a method for manufacturing a flash memory device, a first gate insulating film, a first gate conductive film, and a second insulating film are sequentially formed on a semiconductor substrate. A region where a first gate is to be formed is defined by etching the second insulating film to expose an upper portion of the first gate conductive film. Second conductive film spacers are formed along sidewalls of the etched second insulating film. An oxide film is formed on the exposed surface of the second conductive film spacers and the first gate conductive film. Silicon insulating spacers are formed on the sidewalls of the etched second insulating film. A source junction contact hole is formed by etching the first gate conductive film and the first gate insulating film by using the second insulating film and the silicon insulating film spacers as a mask. A source junction contact fill is formed filling the source junction contact hole. The first gate is formed by sequentially removing the second insulating film and the first gate conductive film.

Method for manufacturing flash memory device

Growing community of inventors

Yongin, South Korea

Dai-Geun Kim