Industrial Cooperation Foundation Chonbuk National University

University of Texas System

Daesuk Kim

Robert Magnusson

The present inventive concepts relate to an inspection apparatus that snapshots an interference image pattern having a high spatial carrier frequency produced from a one-piece off-axis polarimetric interferometer and that precisely and promptly measures a Stokes vector including spatial polarimetric information. The inspection apparatus dynamically measure in real-time a two-dimensional polarization information without employing a two-dimensional scanner.

Polarization measurement with interference patterns of high spatial carrier frequency

The present inventive concepts comprises linearly polarizing light, splitting the linearly polarized light into a first light and a second light, modulating the first light and the second light to have a phase difference to produce an output wave light, converting the output wave light to have a linear shape in a first direction to radiate the converted output wave light to a measured object, receiving a measurement light coming out of the measured object and linearly polarizing the first light and the second light of the measurement light to generate an interference light, and obtaining from the interference light an image of the measured object. The measured object can be scanned in a second direction intersecting the first direction or may be scanned rotationally about an axis in a third direction perpendicular to the first and second directions.

Inspection apparatus and inspection method

A spectroscopic device is disclosed. The spectroscopic device can include a beam collimation structure with a white light source. The beam collimation structure can also include a lens configured to generate a collimated light beam. The spectroscopic device can also include a polarization modulation structure. The polarization modulation structure can convert the collimated light beam into a common path light beam. The common path light beam can include a delayed component and a polarized component. The spectroscopic device can include a dual spectrum sensing structure. The dual spectrum sensing structure can sense a normalized spectral Stokes vector in real time speed.

Growing community of inventors

Jeonju-si, South Korea

Daesuk Kim