Honeywell International Inc.

Daesik Park

David Chandu-Lall

Oleg Korniyenko

A thermal mass flow sensor is disclosed that includes a housing () having a first sensor region and a second sensor region, a first thin film temperature sensor () formed at the first sensor region and a second thin film temperature sensor () formed at the second sensor region. A heating element () is arranged to heat the first temperature sensor () and a controller () is operably connected to the first temperature sensor (), the second temperature sensor () and the heating element (), and controls a power level to the heating element () to maintaining a temperature difference between the first temperature sensor () and the second temperature sensor (). A thin film temperature sensor and a method of using the thermal mass flow sensor are also disclosed.

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Mississauga, Canada

Daesik Park