Samsung Electronics Co., Ltd.

Daehyun Lee

Sangwook Park

Dongho Shin

Dongyun Yeo

Youngeun Kim

Minji Park

Suwon Seo

Youngil Kang

Jaesuk Kim

Chunghun Lee

Kyoung-mi Choi

Kihak Lee

Disclosed is a plasma processing apparatus comprising a plasma electrode, an electrostatic chuck, and a diode board. The electrostatic chuck includes a microheater layer and a chuck electrode. The microheater layer includes an inner heater part and an outer heater part. The inner heater part includes a first inner heater in a first inner region that circumferentially surrounds a center of the microheater layer, and a second inner heater in a second inner region that circumferentially surrounds the first inner region. The outer heater part includes a first outer heater in a first outer region that circumferentially surrounds the second inner region, and a second outer heater in a second outer region that circumferentially surrounds the first outer region. A distance between centers of the first and second outer heaters is less than that between centers of the first and second inner heaters.

Plasma processing apparatus and semiconductor fabrication method using the same

A display device according to an embodiment in the present disclosure comprises: a display; a communication unit to perform communication; a memory storing one or more instructions; and a control unit including at least one processor to perform at least one of the one or more instructions. The display device according to an embodiment in the present disclosure can increase the convenience and efficiency of refund processing by automatically providing a refund request method based on reproduction quality information of a content item.

Display device and server for communicating with display device

A display apparatus may include a display, a communicator including circuitry configured to communicate with a server, a user input unit including circuitry configured to receive a user input, and a processor. The processor may be configured to, based on a first user input, control the display to display a menu providing at least one image quality of a preview content that is selectable, receive a second user input of selecting the at least one image quality of the preview content, control the communicator to transmit a request for the preview content at the selected image quality to the server, and control the display to display an image based on the preview content received from the server.

Display apparatus and control method thereof for providing preview content

Growing community of inventors

Suwon-si, South Korea

Daehyun Lee