Lg Chem, Ltd

Dae-Yeon Lee

Jae-Ik Song

Won-Jae Moon

Hyung-Young Oh

Ye-Hoon Im

Kyoung-Hoon Min

Su-Chan Park

Young-Kuk Kim

Kyu-Chul Chung

Hyun-Chul Chung

Young-Sik Kim

Chang-Hee Lee

Sang-Oeb Na

Heui-Joon Park

Yang-Han Kim

Kil-Ho Kim

Wook Jeong

Disclosed are an apparatus and a method for monitoring a glass plate polishing state. The apparatus may include a location measuring unit for measuring a location on a glass plate being polished by a polishing machine, a current measuring unit for measuring an electric current flowing into the polishing machine, a memory unit for storing a reference value of the electric current flowing into the polishing machine for each polishing location of the glass plate, and a control unit for determining whether a polishing state is faulty, by comparing a value of the electric current measured by the current measuring unit for each polishing location measured by the location measuring unit with a corresponding reference value of the electric current stored in the memory unit for each polishing location.

Apparatus and method for monitoring glass plate polishing state

Disclosed is a substrate polishing method capable of minimizing a difference of polishing amounts between a center portion and a rim portion of a large scale plate during a plate polishing process.

Method for uniformly polishing large scale plate

A polishing pad of a polishing system is mountable to a polishing plate and has a predetermined channel pattern so as to allow a polishing liquid supplied from a polishing liquid supplier to move on a polishing surface. The channel pattern has at least two kinds of patterns.

Polishing pad of polishing system

A lower unit for a glass polishing system includes a support installed to a rotatable turntable, and a carrier having a supporting part for supporting a glass to be polished, and a placing part formed in a surface opposite to the supporting part and fixed and placed to the support.

Lower unit for glass polishing system and glass polishing method using the same

Growing community of inventors

Chungbuk, South Korea

Dae-Yeon Lee