Samsung Electronics Co., Ltd.

Lg Electronics Inc.

Dae-gab Gweon

Ki-Hyun Kim

Dong-Min Kim

Dong-Woo Kang

Suk-won Lee

Byung-il Ahn

Seung-Woo Lee

Kwang-Soo Kim

Dong-Kyun Kang

Suk-Won Lee

Hyeong-Ryeol Oh

Hong-Ki Yoo

A transfer apparatus includes at least four fine actuators each having a coil assembly with a wound coil, and a pair of movable magnets having different polarities and spaced from each other to interpose the coil assembly therebetween, a coil supporter to support the at least four coil assemblies so that the fine actuators are arranged in a pair of groups thereof symmetrically with respect to a predetermined straight line, a magnet supporter to support the at least four movable magnets corresponding to the respective coil assemblies, and a controller to control the fine actuator to move one of the coil supporter and the magnet supporter with respect to the other one. With this configuration, a transfer apparatus can perform a super-precision positioning control by decreasing a positioning control error.

Transfer apparatus

A confocal scanning microscope using a Nipkow disk prevents deterioration of performance in an optical axis direction while maintaining a high measurement speed. The confocal scanning microscope includes a light source, an illuminating device to pass the light from the light source toward a certain direction, and two Nipkow disks each having slit-shaped apertures formed thereon such that the light incident from the illuminating device travels in a form of light which passed through a single aperture. In addition, the confocal scanning microscope includes a first optical system to form an image on a sample by the light passed through the Nipkow disks, and a second optical system to form a second image by the light reflected from the sample and passed through the Nipkow disks.

Confocal scanning microscope using two Nipkow disks

A stage apparatus may include a first stage, a second stage movable with respect to the first stage, at least one flexure hinge to connect the first stage with the second stage, a plurality of actuators provided between the first stage and the second stage to push the first stage and the second stage and to be symmetric with respect to a center of the first stage and the second stage, and a controller to control the plurality of actuators to move one of the first stage and the second stage with respect to the other one of the first stage and the second stage. Thus, a position error of the stage can be reduced, which enables an ultra precision position control. Further, a piezoelectric driver using piezoelectric elements may be used as the actuator to decrease the position error more than a conventional driver such as a motor. The position error may be decreased to &#xb1;10 nm.

Stage apparatus

A high resolution lens is provided as a condensing lens for collecting light made incident from a light source, of which one face is plane and the other face is curved. The curved face of the lens is coated with a reflecting material except for its central apex portion, and incident light is made incident through the plan portion of the lens. The curved face of the high resolution lens may be spherical or is a parabolic face to reduce aberration. When a parallel light is made incident on the plane face of the high resolution lens, it is reflected in the lens and totally reflected, and then is transmitted through the uncoated apex to an external object.

High resolution lens

Growing community of inventors

Daejeon, South Korea

Dae-gab Gweon