Korea Advanced Institute of Science and Technology

Soonhan Engineering, Inc.

Eun Jin Sohn Patent & Law Office

Dae Gab Gweon

Dong Kyun Kang

Ki Hyun Kim

Dong Min Kim

Jong Yeop Shim

Jae Wha Jeong

Sung Lim Park

Young-Man Choi

Jung Woo Seo

Hun Taek Jung

Da Hoon Ahn

Jung Jae Kim

A sample traveling stage is used for inspection equipment or precision processing equipment for semiconductors or FPDs, (Flat Panel Displays). The sample traveling stage includes a moving part in which a first slide, which is mounted on a base frame and moves along a first guide block, and a second slide, which is mounted on the first slide and moves along a second guide block, is installed in a mutually crossing direction. A traveling part that travels sample through the sample table is installed by a flexure mechanism module formed on the second slide and measures displacement through the X, Y bar mirror installed at the above sample table in a mutually vertical direction. A measuring part includes a laser head, a beam divider, and an interferometer installed at the operating path of the moving part forms the output into a displacement signal by receiving the input beam interference signal reflected by the X, Y bar mirror from receiver. The deformation error of the mirror and sample, including the sample table, decreases because deformation by the slide is not delivered to the sample table, and measuring accuracy improves because the relative distance of the mirror and the sample is set. Productivity improves due to the minimization of defective proportions because the accuracy is improved.

Sample traveling stage with flexure mechanism module to absorb the deformation of the slide

Disclosed is a real time confocal microscope using a dispersion optics comprising: a broad band light source for supplying light; an illumination optics for illuminating onto a slit aperture by collecting the light emitted from the light source; the slit aperture for only passing a region of the slit among the light illuminated from the illuminating optics; a tube lens for making the lights passing through the slit aperture to be parallel lights; a first dispersion optics for making the parallel lights emitted from the tube lens propagate in different angles according to wavelengths; an objective lens for illuminating the lights emitted from the first dispersion optics on a specimen; a first image formation lens for making the lights reflected from the specimen and passing through the slit apertureto be parallel lights; a second dispersion optics for making the parallel lights emitted from the first image formation lens propagate in different angles according to wavelengths; a second image formation lens for image forming the lights emitted from the second image formation optics; and a two dimensional photoelectric detector for converting the lights emitted from the second image formation lens into an electric signal.

Real-time confocal microscope using the dispersion optics

The present invention relates to confocal self-interference microscopy. The confocal self-interference microscopy further includes a first polarizer for polarizing reflected or fluorescent light from a specimen, a first birefringence wave plate for separating the light from the first polarizer into two beams along a polarizing direction, a second polarizer for polarizing the two beams from the first birefringence wave plate, a second birefringence wave plate for separating the two beams from the second polarizer into four beams along the polarizing direction, and a third polarizer for polarizing the four beams from the second birefringence wave plate, in the existing confocal microscopy. Optic-axes of the first and second birefringence wave plates exist on the same plane, optic-axes of the first and second birefringence wave plates are inclined from an optical axis of the entire optical system at a predetermined angle, and self-interference spatial periods of the first and second birefringence wave plates are different from each other.

Confocal self-interference microscopy from which side lobe has been removed

A 3-axis straight-line motion stage and a sample test device using the same for supporting a predetermined sample, and comprising X-axis, Y-axis and Z-axis stages for moving the sample independently and precisely in the direction of the X-axis, the Y-axis or the Z-axis of rectangular coordinates. The 3-axis straight-line motion stage comprises a bottom platehaving a predetermined area and thickness; a X-axis stagefixed in a reference area RR of the bottom platefor moving in the direction of the X-axis a first X area RXpositioned from the reference RR to the direction of the X-axis; a Y-axis stagepositioned within the first X area RXand fixed in a second X area RXwhich is located within the first X area RXfor moving in the direction of the Y-axis a second Y area RYpositioned from the second X area to the direction of the Y-axis; and a Z-axis stagefixed in the second Y area RYwhich is located within the first Y area RYand supporting a predetermined sample for moving the sample in the direction of the Z-axis.

3-axis straight-line motion stage and sample test device using the same

An ellipsometer for aligning incident angle comprising: a main frame shaping half circle and flat surface on which a plurality of grooves are radial and circumferential directionally carved; a specimen stage, which is installed at the groove-caved surface of the main frame, for tilting a specimen on a upper surface of the specimen stage with respect to horizontal direction and translating the specimen upward and downward; a polarizing unit, which is capable of fixing and moving on the groove-carved surface of the main frame, for polarizing a light from a light source and outputting the polarized light to the specimen, and moving on the groove-carved surface; and a light detecting unit, which is capable of fixing and moving on the groove-carved surface, for a reflection light from the specimen.

Ellipsometer and precision auto-alignment method for incident angle of the ellipsometer without auxiliary equipment

A high-precision displacement measurement device and linear or rotational displacement measurement method using a unit displacement sensor based on a confocal theory. This device is simpler in construction, lower in cost and superior in resolution to other displacement measurement devices, and is capable of measuring a much wider area than other measurement equipment. The present device is adapted to project a spot of light from a light source on an object whose displacement is to be measured and measure a relative displacement of the object from a displacement of the projected light spot. To this end, the unit displacement sensor includes a transmission lens for transmitting a divergent beam of light emitted from the light source through a slit or pinhole with a certain size, a collimating lens for collimating the light beam transmitted through the slit or pinhole, an object lens arranged between the collimating lens and the object, a beam splitter for splitting a beam of light, reflected from the object to the transmission lens, according to a wavelength, and a photodetector for detecting a light intensity of the light beam split by the beam splitter. A piezoelectric actuator is provided to finely move the unit displacement sensor so as to always maintain optical signals detected by the photodetector at the maximum intensity.

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Daejeon, South Korea

Dae Gab Gweon