Sae Magnetics (h.k.) Limited

Da Yao He

Jian Hui Huang

Ryuji Fujii

Hong Tao Ma

Xiao Ke Ding

Peng Liu

Rong Huang

De Jin Fan

Hua Li

The present disclosure discloses a device with a protective layer, including a substrate, a seed layer formed on the substrate, and a diamond-like carbon layer formed on the seed layer, where the seed layer is a silicon nitride layer, and a content of nitrogen in the silicon nitride layer is 9%-17%. The present disclosure further discloses a microwave-assisted magnetic recording (MAMR) head slider, a head gimbal assembly, and a disk drive unit. The device has good thermal stability, oxidation resistance and corrosion resistance, thereby improving reliability and prolonging service life of an MAMR head.

Microwave-assisted magnetic recording (MAMR) head slider with diamoind-like carbon layer and a silicon nitride layer, and related head gimbal assembly and disk drive unit

A manufacturing method for a head slider coated with Diamond-like Carbon (DLC) includes: providing a substrate that is to be finally made into a head slider; depositing a DLC layer on a surface of the substrate, with carbon plasma source being sputtered in a direction that is vertical to the surface of the substrate; and doping a fluorine-doping (F-doping) layer on the DLC layer. Whereby the head slider has good film adhesion performance, higher hardness, better wear resistance, lower surface energy to obtain good hydrophobicity and oleophobicity, and lower fly height in HDD.

Manufacturing method for a head slider coated with DLC

Growing community of inventors

Hong Kong, China

Da Yao He