Taiwan Semiconductor Manufacturing Comp. Ltd.

Da-Hsiang Chou

Chia-Shiung Tsai

Yeur-Luen Tu

Chung-Yi Yu

Che Ying Hsu

Ping-Yin Liu

Ming-Te Chen

Martin Liu

Li-Chung Wang

Wen-Shan Chang

Cheng-Chia Kuo

Jung-Chang Chen

Shih-Chang Hsu

Jong-Min Lin

Kuo-Ming Yu

Kuo-Chuan Chen

Provided is an apparatus and a method of holding a device. The apparatus includes a wafer chuck having first and second holes that extend therethrough, and a pressure control structure that can independently and selectively vary a fluid pressure in each of the first and second holes between pressures above and below an ambient pressure. The method includes providing a wafer chuck having first and second holes that extend therethrough, and independently and selectively varying a fluid pressure in each of the first and second holes between pressures above and below an ambient pressure.

Method and apparatus of holding a device

A clamp for quickly, effectively and safely removing a cathode collar from an HDP deposition chamber for routine maintenance, cleaning or replacement of the collar. The clamp includes a pair of clamp plates which are capable of pivoting movement on respective ends of a connecting rod. A clamp shoe for gripping a corresponding edge of the annular collar is provided on the bottom end of each clamp plate, and a turnbuckle is fitted with a pair of threaded shafts which engage the upper end portions of the respective clamp plates. By rotating the turnbuckle, the threaded shafts are advanced away from each other against the clamp plates, which pivot on the connecting rod and cause the clamp shoes to tightly engage respective edges of the collar. The clamp is grasped to lift the collar from the chamber and replace the collar in the chamber after cleaning or maintenance.

Collar removing clamp for HDP chamber

Growing community of inventors

Tainan, Taiwan

Da-Hsiang Chou