Fluoroware, Inc.

Entegris, Inc.

D Kerry Kiser

Dennis J Krampotich

Michael D Peterson

In a preferred embodiment of the invention, a transport module suitable for 300 mm wafers has a cushioning system that attaches to the interior of an enclosure door. The system comprises a pair of upright parallel cushions, each comprising an elongate base portion with a plurality of integral fingers extending at an acute angle from the base members. Each sequential finger of each cushion engaging every other wafer. Each finger having an arm portion and a wafer engaging portion. The wafer engaging portion comprising a curved convex surface to provide minimal vertical line contact with the circumferential outer surface of the wafer without providing axial constrainment of the wafer. The base portions are attached to the inside facing door panels by a plurality of attachment portions each comprising a split shank portion that extends through the aperture and a plurality of flange portions on the ends of the split shank portions for securing the base portions to the inside panel. An O-ring may be positioned on the shank portion for sealing the connection. Additional extension members may extend intermediate the arm portions to provide a contact point laterally displaced from the base member such that when the wafer engagement portions are loaded by engagement with the wafers, the connection of the attachment portion to the interior door panel operates as a fulcrum to precisely control the positioning, holding force, and deflection of the fingers.

Cushion system for wafer carriers

A wafer container comprising an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door for insertion into the door frame for closing the opening and sealing with the door frame has an improved elastomeric seal. In a preferred embodiment of the invention an elastomeric seal encircles the door, is partially inset in a groove in the door, and has a cantilevered portion extending laterally outwardly from the door to engage a sealing surface of the door and a laterally displaced sealing surface of the door frame when the door is seated. Thus a seal can be provided that is effected almost totally by flexure of the cantilevered portion rather than by compression of the seal.

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Sherwood, OR, United States of America

D Kerry Kiser