Average Co-Inventor Count = 4.33
ph-index = 7
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Varian Semiconductor Equipment Associates, Inc. (13 from 916 patents)
2. Applied Materials, Inc. (5 from 13,700 patents)
3. Mks Instruments, Inc. (4 from 539 patents)
22 patents:
1. 12278124 - Model-based controlled load lock pumping scheme
2. 11557496 - Load lock with integrated features
3. 11545375 - Hybrid control system for workpiece heating
4. 11543296 - Method and apparatus for calibration of substrate temperature using pyrometer
5. 11473978 - Enhanced substrate temperature measurement apparatus, system and method
6. 10443934 - Substrate handling and heating system
7. 9685303 - Apparatus for heating and processing a substrate
8. 9633875 - Apparatus for improving temperature uniformity of a workpiece
9. 9633886 - Hybrid thermal electrostatic clamp
10. 9287148 - Dynamic heating method and system for wafer processing
11. 8933335 - Current lead with a configuration to reduce heat load transfer in an alternating electrical current environment
12. 8672311 - Method of cooling textured workpieces with an electrostatic chuck
13. 8466431 - Techniques for improving extracted ion beam quality using high-transparency electrodes
14. 8455760 - Interfacing two insulation parts in high voltage environment
15. 8143604 - Insulator system for a terminal structure of an ion implantation system